National Taiwan University

Industrial Technology Research Institute

Chih Kung Lee

Chii-Wann Lin

Shiming Lin

Yi Chun Chen

Way-Seen Wang

Shu Lee

Jyi Tyan Yeh

Yu Tsung Chiu

Liang Bin Yu

Chun Ti Chen

Chyan Chi Wu

Chau Shioung Yeh

You Chia Chang

Jiunn Woei Liaw

Ding Zheng Lin

Kuo Tung Huang

Yeong Feng Wang

Zhi-Hsiang Sung

Cheng-Lung Lee

Chen Kung Huang

Peizen Chang

The present invention provides an optical head with a single or multiple sub-wavelength light beams, which can be used in arenas such as photolithography, optical storage, optical microscopy, to name a few. The present invention includes a transparent substrate, a thin film, and a surface structure with sub-wavelength surface profile. The incident light transmits through the transparent substrate, forms a surface plasma wave along the sub-wavelength aperture located within the thin film, and finally re-emits through spatial coupling with the sub-wavelength profile of the surface structure. As the coupled re-emitting light beam or light beams can maintain the waist less than that of the diffraction limit for a few micrometers out of the surface with sub-wavelength profile in many cases, this invention can have applications ranging from micro or nano manufacturing, metrology, and manipulation by using light beams with waist smaller than the diffraction limit.

Optical head capable of providing a subwavelength beams

A biomolecular sensor system utilizing a transverse propagation wave of surface plasmon resonance (SPR) is described. The system comprises: a substrate; a dielectric layer, having a groove therein and standing on top of the substrate; a sensing film layer, sitting at the groove; a pair of prism devices, each resting on one side of the groove and both separating a tunable distance. Besides, the sensor system further comprises a light source, a light detector (a frontend of which connecting to a spectrometer and a backend connecting to a differential amplifier) and a channel with a cover forming inside the groove for the acquisition of the reflected light from the prism devices. Since the sensor system is constructed by exploiting the SPR technique on the transverse propagation, a whole contact surface is under detection (parallel detection) which differentiates it from the traditional method of single-area SPR detection. The sensor system is applicable not only for the far-infrared remote sensing with a transverse distance of several centimeters, but further for the biomedical sensing applications in the miniature sizing and high throughput.

Biomolecular sensor system utilizing a transverse propagation wave of surface plasmon resonance (SPR)

The present invention is in related to a miniature surface plasmon resonance waveguide device with sinusoidal curvature compensation and at least comprises: a substract, a waveguide structure, a sensing film layer and a cover layer, wherein the waveguide structure is configured with the function of sinusoidal curvature compensation and installed above the substract, further that, the waveguide structure includes a light input port and a light output port; the sensing film layer is on a special region of the waveguide structure, the special region is a sensing region; the cover layer is upper than the substract and has an opening. By means of the optimal curve figure of the sinusoidal curvature compensation, attenuation of light energy can be minimized while in propagation, and allows the input and output of the light on the same side of the device.

Miniature surface plasmon resonance waveguide device with sinusoidal curvature compensation

A symmetric or asymmetric multilayer structure based on the technique of surface plasmon resonance (SPR) has been applied for modulation of resonant angle and wavelength. The fabrication of this invention can have nanoscale thin film layers up to several hundreds, while each layer has its own material of a high or low refractive index value, and the total layers in a thickness of tens to hundreds nanometers are grown in this single structure. This invention is intended for optimizing the scanning of mechanism by modulating SPR resonant angle and wavelength, and for developing the prospect of portable instruments.

Repeated structure of nanometer thin films with symmetric or asymmetric configuration for SPR signal modulation

Growing community of inventors

Taipei, Taiwan

Chih Kung Lee