Taiwan Semiconductor Manufacturing Comp. Ltd.

Chih-Jen Pan

Ju-Kau Chen

Meng-Chao Huang

Amy Chen

Rebecca Hsu

A manufacturing process control system comprises a process controller and an order manager coupled to a network. When receiving an order for a batch of lots requiring a manufacturing process by a manufacturing entity, the order manager automatically provides an electronic list comprising entries corresponding to stages of the manufacturing process, at which processing of the lots can be held. When order manager receives designation of a first entry on the list through the network, the process controller monitors the lots while the lots are being processed in the manufacturing entity, and automatically directs at least one lot to be held before processing thereof at a stage to which the first entry corresponds.

Growing community of inventors

Hsinchu, Taiwan

Chih-Jen Pan