Tsinghua University

Industrial Technology Research Institute

Academia Sinica

Chih-Hsuan Lu

Bo-Han Chen

Shang-Da Yang

Ming-Chang Chen

Chao-Yang Lin

Pei-Chi Huang

Ping-Han Wu

Shang-Yu Hsu

Zih-Yi Li

Andrew Hing Cheong Kung

Yu-Chen Cheng

Andrew Hing-Cheong Kung

Jhan-Yu Guo

Yi-Chi Lee

A laser machining device includes a pulsed laser generator, an accommodation chamber, a bandwidth broadening unit and a pulse compression unit. The pulsed laser generator is configured to emit a pulsed laser. The accommodation chamber has a gas inlet. The bandwidth broadening unit is disposed in the accommodation chamber, and is configured to broaden a frequency bandwidth of the pulsed laser to obtain a broad bandwidth pulsed laser. The pulse compression unit is disposed in the accommodation chamber. The bandwidth broadening unit and the pulse compression unit are arranged in order along a laser propagation path, and the pulse compression unit is configured to compress a pulse duration of the broad bandwidth pulsed laser.

Laser machining device and method thereof

A coherent Raman spectro-microscopy system is configured for generating a spectro-microscopic image of a sample and includes a light source, a supercontinuum spectrum generator, a color filter assembly, and a spectro-microscopic assembly. The light source is for emitting at least one pulsed laser beam. The supercontinuum spectrum generator is for broadening the bandwidth of at least one pulsed laser beam. The color filter assembly is for filtering the bandwidth of at least one pulsed laser beam according to a predetermined bandwidth and converting at least one pulsed laser beam into a coherent spectro-microscopic laser beam. The sample is disposed in the spectro-microscopic assembly, and the spectro-microscopic assembly receives the coherent spectro-microscopic laser beam so that the coherent spectro-microscopic laser beam passes through the sample to generate the spectro-microscopic image of the sample.

Coherent Raman spectro-microscopy system and method thereof

An EUV radiation light source generation apparatus includes a pump laser, at least one pulse shaping unit, a wavelength conversion unit, and a high-order harmonics generation unit. The pump laser provides a pulse laser radiation beam. Each pulse shaping unit conducts a spectrum extending operation and a phase compensation operation to the pulse laser radiation beam. The phase compensation operation makes multiple frequency components of the pulse laser radiation beam emitted by the pulse shaping unit to be substantially in phase. The wavelength conversion unit conducts a center wavelength conversion operation to the pulse laser radiation beam. The high-order harmonics generation unit receives the pulse laser radiation beam processed by the pulse shaping unit and the center wavelength conversion operation, and focuses the received pulse laser radiation beam to a high order harmonic generation medium to generate a high order harmonic radiation beam.

Light source generation apparatus, light source generating method, and related defect detection system

A laser source apparatus is for providing a beam path to generate a first laser beam and a second laser beam. The laser source apparatus includes a laser generator, at least one spectrum broadening unit and a beam splitter on the beam path. The laser generator is configured to generate an original laser beam with a pulse duration smaller than 1 ps. The spectrum broadening unit is configured in a following stage of the laser generator. The spectrum broadening unit includes a multiple plate continuum. The multiple plate continuum includes a plurality of thin plates, and the thin plates are configured along the beam path in order. The beam splitter is configured in the following stage of the laser generator to divide the original laser beam into the first laser beam and the second laser beam.

Laser source apparatus with multiple plate continuum and measurement system therewith

Apparatuses and methods for supercontinuum generation using a laser beam and a plurality of condensed state transparent plates are presented. As an example, plate material to be used for one of the plurality of plates is determined. A thickness of the one of the plurality of plates is also determined. An allowable laser intensity of the laser beam is then determined to be &#x3bb;/(2nnL), where &#x3bb; is the central incident wavelength in vacuum, nis the linear refractive index, nis the third-order nonlinear coefficient. A location of a next plate is then determined to be a distance downstream from the one of the plurality of plates where a laser intensity of the laser beam returns to a value of the determined allowable laser intensity.

Supercontinuum generation apparatus and method

A continuous spectrum generation apparatus including a laser light source and a plurality of condensed state transparent plates is provided. The laser light source is configured to emit a laser beam. The condensed state transparent plates are disposed on the transmission path of the laser beam in sequence, and configured to successively extend the spectral bandwidth of the laser beam in sequence. An assembling method of a continuous spectrum generation apparatus is also provided.

Growing community of inventors

Pingtung County, Taiwan

Chih-Hsuan Lu