United Microelectronics Corp.

Chih-Haw Lee

Tzu-Ping Chen

Chien-Hung Chen

Chun-Lung Chang

Wei-Shiang Huang

Kuan-Yi Tseng

A split-gate flash memory cell includes a semiconductor substrate having thereon a select gate oxide layer and a floating gate oxide layer. A floating gate is disposed on the floating gate oxide layer. A football-shaped oxide layer is disposed on the floating gate. The floating gate includes tips under the football-shaped oxide layer. A select gate is disposed on the select gate oxide layer and extended onto the football-shaped oxide layer. An inter-poly oxide layer is between the select gate and the floating gate. The inter-poly oxide layer has a thickness smaller than a thickness of the select gate oxide layer. A source region is formed in the semiconductor substrate and adjacent to the floating gate. A drain region is formed in the semiconductor substrate and adjacent to the select gate.

Split-gate flash memory cell and fabrication method thereof

A method for fabricating semiconductor device includes providing a substrate having a first device region and a second device region. Floating gate structure is formed in the first device region. Liner layer and nitride layer are sequentially deposited over the first device region and the second device region. The floating gate structure is conformally covered. Etching back process is performed on the nitride layer to reduce thickness of the nitride layer. The first device region is still covered by the nitride layer. A photomask layer is formed over the substrate with an opening region to expose the second device region for cleaning. The photomask layer is removed. A gate oxide layer grows on the substrate in the second device region. Anisotropic etching process is performed to remove the nitride layer, resulting in a nitride spacer on a lower portion of a sidewall of the floating gate structure.

Method for fabricating semiconductor device

A single poly electrical erasable programmable read only memory (EEPROM) includes a source, a drain, a dielectric layer and an electrode layer. The source and the drain are located in a substrate, wherein the source and the drain have a first conductive type. The dielectric layer is disposed on the substrate and between the source and the drain, wherein the dielectric layer includes a first dielectric layer having two tunnel dielectric parts separating from each other, and thicknesses of the two tunnel dielectric parts are thinner than thicknesses of the other parts of the first dielectric layer. The electrode layer is disposed on the dielectric layer, wherein the electrode layer includes a first electrode disposed on the first dielectric layer, thereby the first electrode being a floating gate.

Single poly electrical erasable programmable read only memory (EEPROM)

A gate structure is provided. The gate structure includes a substrate, a gate disposed on the substrate and a gate dielectric layer disposed between the substrate and the gate, wherein the gate dielectric layer is in the shape of a barbell. The barbell has a thin center connecting to two bulging ends. Part of the bulging ends extends into the gate and the substrate.

Semiconductor structure and a fabricating method thereof

A nonvolatile memory device comprises a substrate, a gate electrode, a single charge trapping sidewall and a source/drain region. The gate electrode is disposed on and electrically isolated from the substrate. The single charge trapping sidewall is disposed adjacent to a sidewall of the gate electrode and electrically isolated from the substrate and the gate electrode, so as to form a non-straight angle between the substrate and the single charge trapping sidewall. The source/drain region is disposed in the substrate and adjacent to the gate electrode.

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Taipei, Taiwan

Chih-Haw Lee