United Microelectronics Corp.

Chih-Chung Wang

Wen-Fang Lee

Nien-Chung Li

Ke-Feng Lin

Chiu-Te Lee

Shih-Yin Hsiao

Te-Yuan Wu

Ming-Tsung Lee

Ping-Hung Chiang

Kuan-Chuan Chen

Ching-Chung Yang

Wei-Lun Hsu

Shin-Hung Li

Cheng-Hua Yang

Ming-Shun Hsu

Wei-Lin Chen

Chang-Po Hsiung

Shan-Shi Huang

Shu-Wen Lin

Shih-Chieh Pu

Chiu-Ling Lee

Chih-Chien Chang

Kai-Kuen Chang

Kuan-Liang Liu

Shih-Teng Huang

Chia-Lin Wang

Hsuan-Po Liao

Chih-Wei Hsu

Sheng-Chen Chung

Kun-Huang Yu

Chen-An Kuo

Min-Hsuan Tsai

Ching-Ming Lee

Chia-Ling Wang

Chia-Wen Lu

Po-Ching Chuang

Kuang-Hsiu Chen

Li-Che Chen

Chin-Chia Kuo

Ming-Hua Tsai

Yen-Ming Chen

Kuan-Yu Chen

Jung Han

Wen-Peng Hsu

Liang-An Huang

Ching-Wei Teng

Tseng-Hsun Liu

Yuan-Cheng Yang

Chun-Lin Chen

Su-Hwa Tsai

Chung-I Huang

Pao-An Chang

Hsiang-Hua Hsu

Yi-Han Su

Kuan-Lin Liu

Shih Chieh Pu

Yan-Huei Li

Fu-Chun Chien

Kai-Ting Hu

Chih-Chun Pu

Yu-Ting Yeh

Kuan-Wen Lu

A metal-oxide-semiconductor (MOS) transistor includes a substrate. The substrate has a plurality of trenches extending along a first direction and located on a top portion of the substrate. A gate structure line is located on the substrate and extends along a second direction intersecting with the first direction and crossing over the trenches. A first doped line is located in the substrate, located at a first side of the gate structure line, and crosses over the trenches. A second doped line is located in the substrate, located at a second side of the gate structure line, and crosses over the trenches.

Metal-oxide-semiconductor transistor and method of fabricating the same

A gate oxide forming process includes the following steps. A substrate including a first area and a second area is provided. A first oxide layer, a silicon containing cap layer and a second oxide layer on the substrate of the first area and the second area are sequentially and blanketly formed. The silicon containing cap layer and the second oxide layer in the first area are removed. An oxidation process is performed to oxidize the silicon containing cap layer and a gate oxide layer is formed in the second area.

Gate oxide forming process

Method for fabricating semiconductor device, including semiconductor layer having first device region and second device region. A shallow trench isolation (STI) structure is in the semiconductor layer and located at periphery of the first and second device regions. A first and second insulating layers are on the semiconductor layer and respectively located in the first and second device regions. A first gate structure is located on the first insulating layer. A source region and a drain region are in the semiconductor layer and are located at two sides of the first gate structure. A gate doped region is in a surface region of the semiconductor layer in the second device region to serve as a second gate structure. A channel layer is located on the second insulating layer. A source layer and a drain layer are on the STI structure and are located at two sides of the channel layer.

Method for fabricating semiconductor device

A semiconductor structure and a manufacturing method of a semiconductor structure are provided. The semiconductor structure includes a semiconductor substrate, a gate, a first diffusion region and a second diffusion region. The gate is disposed on the semiconductor substrate and extends along a first direction. The first diffusion region is formed in the semiconductor substrate, and the second diffusion region is formed in the first diffusion region. The first diffusion region has a first portion located underneath the gate and a second portion protruded from a lateral side of the gate, the first portion has a first length parallel to the first direction, the second portion has a second length parallel to the first direction, and the first length is larger than the second length.

Semiconductor structure and manufacturing method of the same

A transistor with dual spacers includes a gate, a first dual spacer and a second inner spacer. The gate is disposed on a substrate, wherein the gate includes a gate dielectric layer and a gate electrode, and the gate dielectric layer protrudes from the gate electrode and covers the substrate. The first dual spacer is disposed on the gate dielectric layer beside the gate, wherein the first dual spacer includes a first inner spacer and a first outer spacer. The second inner spacer having an L-shaped profile is disposed on the gate dielectric layer beside the first dual spacer. The present invention also provides a method of forming said transistor with dual spacers.

Method of forming transistor with dual spacer

Transistor with dual spacer and forming method thereof

A transistor structure including a substrate, a transistor device, a split buried layer, and a second buried layer is provided. The substrate has a device region. The transistor device is located in the device region. The split buried layer is located under the transistor device in the substrate and includes first buried layers separated from each other. The second buried layer is located under the split buried layer in the substrate and connects the first buried layers. The second buried layer and the split buried layer have a first conductive type. The transistor structure may have a higher breakdown voltage.

Transistor structure

A semiconductor device including a substrate and a shallow trench isolation (STI) structure is provided. The substrate has a first voltage area and a second voltage area. A top surface of the substrate in the second voltage area is higher than a top surface of the substrate in the first voltage area, and a trench is defined in the substrate in between the first and second voltage area. The STI structure is located in the substrate within the trench, wherein a first portion of the STI structure is located in the first voltage area, a second portion of the STI structure is located in the second voltage area, and a step height difference exist in between a bottom surface of the first portion of the STI structure in the first voltage area and a bottom surface of the second portion of the STI structure in the second voltage area.

Semiconductor device

A semiconductor device includes semiconductor layer having first device region and second device region. A shallow trench isolation (STI) structure is in the semiconductor layer and located at periphery of the first and second device regions. A first and second insulating layers are on the semiconductor layer and respectively located in the first and second device regions. A first gate structure is located on the first insulating layer. A source region and a drain region are in the semiconductor layer and are located at two sides of the first gate structure. A gate doped region is in a surface region of the semiconductor layer in the second device region to serve as a second gate structure. A channel layer is located on the second insulating layer. A source layer and a drain layer are on the STI structure and are located at two sides of the channel layer.

A metal-oxide semiconductor transistor includes a substrate, a gate insulating layer disposed on a surface of the substrate, and a metal gate disposed on the gate insulating layer, wherein at least one of the length or the width of the metal gate is greater than or equal to approximately 320 nanometers, and the metal gate has at least one plug hole. The metal-oxide semiconductor transistor further includes at least one insulating plug disposed in the plug hole and two diffusion regions disposed respectively at two sides of the metal gate in the substrate.

Metal-oxide-semiconductor transistor and method of forming gate layout

A schottky diode includes a schottky junction, an ohmic junction, a first isolation structure and a plurality of doped regions. The schottky junction includes a first well in a substrate and a first electrode contacting the first well. The ohmic junction includes a junction region in the first well and a second electrode contacting the junction region. The first isolation structure is disposed in the substrate and separates the schottky junction from the ohmic junction. The doped regions are located in the first well and under the schottky junction, wherein the doped regions separating from each other constitute a top-view profile of concentric circles.

Schottky diode

A method of forming a gate layout includes providing a gate layout design diagram comprising at least one gate pattern, disposing at least one insulating plug pattern in the gate pattern for producing a modified gate layout in a case where any one of a length and a width of the gate pattern is greater than or equal to a predetermined size, and outputting and manufacturing the modified gate layout onto a photomask. The predetermined size is determined by a process ability limit, and the process ability limit is a smallest gate size causing gate dishing when a chemical mechanical polishing process is performed to a gate.

A semiconductor structure includes a HV NMOS structure. The HV NMOS structure includes a source region, a drain region, a channel region, a gate dielectric, and a gate electrode. The source region and the drain region are separated from each other. The channel region is disposed between the source region and the drain region. The channel region has a channel direction from the source region toward the drain region. The gate dielectric is disposed on the channel region and on portions of the source region and the drain region. The gate electrode is disposed on the gate dielectric. The gate electrode includes a first portion of n-type doping and two second portions of p-type doping. The two second portions are disposed at two sides of the first portion. The two second portions have an extending direction perpendicular to the channel direction.

High voltage MOS structure and its manufacturing method

A diode structure includes a rectangular first doping region, and a second doping region surrounds the first doping region wherein the first doping region and the second doping region are separated by a first isolation structure. A third doping region surrounds the second doping region wherein the second doping region and the third doping region are separated by a second isolation structure. The first isolation structure, the second doping region, the second isolation structure and the third doping region are arranged in a quadruple concentric rectangular ring surrounding the first doping region.

Diode structure

Growing community of inventors

Hsinchu, Taiwan

Chih-Chung Wang