Nan Ya Technology Corporation

Chih-Chung Sun

Da-Zen Chuang

Pin-Hsiu Hsieh

A method for forming a shallow trench isolation (STI) structure using two individual STI trench etching processes is provided. A first STI etching process forms first trenches with one or more sizes in rows along a first dimension in a silicon substrate. A first dielectric is filled in the first trenches following a first thermal oxidation forming a first liner oxide surrounding the first trenches. A second STI trench etching process forms second trenches with one or more sizes in a second dimension to define active regions separated from each other by the first trenches filled with the first dielectric material and second trenches. A second dielectric is filled in the second trenches following a second thermal oxidation forming a second liner oxide surrounding the second trenches. Active region encroachment caused by the first and second thermal oxidation is reduced by doing the two individual STI trench etching processes.

Method for forming a shallow trench isolation structure with reduced encroachment of active regions and a semiconductor structure therefrom

The present disclosure provides a method of fabricating a semiconductor device. The method includes: providing a semiconductor substrate comprising a memory region and a logic region; forming a memory gate in or on the memory region; forming a plurality of first poly-silicon gates on the memory region and surrounding the memory gate; and forming a plurality of second poly-silicon gates on the logic region simultaneously with the formation of the first poly-silicon gates.

Method of fabricating semiconductor device

The present disclosure provides a semiconductor device and a method of fabricating the same. The semiconductor device includes a semiconductor substrate, a memory cell, a first logic transistor, and a second logic transistor. The semiconductor substrate includes a memory region and a logic region. The memory cell is disposed in the memory region. The first logic transistor is disposed in the memory region and disposed adjacent to the memory cell. The second logic transistor is disposed in the logic region. The first logic transistor is configured to control operation of the memory cell in response to a memory control signal provided by the second logic transistor.

Semiconductor device and method of fabricating the same

The present disclosure provides a DRAM cell structure. The DRAM cell structure includes a substrate, a gate structure disposed in the substrate, a source region and a drain region disposed in the substrate respectively at two sides of the gate structure, a landing pad disposed over the drain region, a plurality of carbon nanotubes disposed on the landing pad, a top electrode disposed over the plurality of carbon nanotubes, and a dielectric layer disposed between the top electrode and the plurality of carbon nanotubes.

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Zhubei, Taiwan

Chih-Chung Sun