Other

Applied Materials, Inc.

Chih Chuan Wang

Boon Sen Chan

Sidda Reddy Kurakula

Abyaya Dhar

Yash Chhabra

Chandrasekhar Roy

Yenwei Hung

A method includes identifying an image of a substrate processing equipment part that forms a plurality of holes. The method further includes determining, by a processing device based on the image, a corresponding neighboring angular distance of each of the plurality of holes and a corresponding area of each of the plurality of holes. The method further includes identifying, by the processing device, a first subset of the plurality of holes that are at least partially clogged based on at least one of the corresponding neighboring angular distance or the corresponding area of each of the plurality of holes. A corrective action associated with the substrate processing equipment part is to be performed based on the first subset of the plurality of holes that are at least partially clogged.

Clog detection via image analytics

A multipurpose floating pillow including an ellipse dish-like lower member having a spherical recess formed on its top surface for receiving an inflatable sac therein. A molded and resilient upper member covers and engages with the lower member. A container may be disposed in a recess formed on the bottom side of the lower member to receive, for example, a weight scale. Pads made of slightly rigid material may be disposed between the inflatable sac and the upper member. The resiliency and softness of the floating pillow can be adjusted through the inflation of the inflatable sac. The floating pillow will therefore not become deformed after long periods of use and may provide different functions on different occasions.

Multipurpose inflatable floating pillow

Growing community of inventors

Hsinchu, Taiwan

Chih Chuan Wang