Taiwan Semiconductor Manufacturing Comp. Ltd.

Chih-Chieh Chen

Chung-Hsing Wang

Jian-Yi Li

Hung-Yi Liu

Yi-Wei Chen

Chih Sheng Tsai

Shu Yi Ying

A method of inserting dummy metal and dummy via in an integrated circuit design includes inserting, by a computer, dummy metals using a place and route tool, wherein the place and route tool has timing-awareness to improve a timing performance of the integrated circuit design, and the dummy metals have a length less than or equal to a predetermined maximum length. The method further includes inserting, by the computer, dummy vias using a design-rule-checking utility separately from the inserting of the dummy metals.

Method for dummy metal and dummy via insertion

A method of inserting dummy metal and dummy via in an integrated circuit design. The method includes inserting, by a computer, dummy metals using a place and route tool, wherein the place and route tool has timing-awareness to improve a timing performance of the integrated circuit design. The method further includes inserting, by the computer, dummy vias using a design-rule-checking utility separately from the inserting of the dummy metals, wherein at least one of the dummy vias has a different size than at least another of the dummy vias.

A system and method for observing threshold voltage variations are provided. A ring oscillator circuit comprises a plurality of inverters arranged in a sequential loop, a plurality of test circuits having devices under test, each coupled between a respective one of the inverters and a power supply. Each test circuit has a bypass field effect transistor (FET) having a first channel coupled between the power supply and a respective one of the inverters responsive to an individual enable signal, and a FET device under test having a second channel arranged in parallel to the first channel. A method is described for determining the threshold voltage of the device under test by disabling, for one of the inverters in the ring oscillator, the first FET device such that the device under test is coupled between the power supply and the respective inverter and affects the operating frequency of the ring oscillator.

System and method for observing threshold voltage variations

A method for dummy metal and dummy via insertion is provided. In one embodiment, dummy metals are inserted using a place and route tool, where the place and route tool has timing-awareness. Then, dummy vias arrays are inserted inside an overlap area of dummy metals using a design-rule-checking utility. Fine-grained dummy vias arrays are inserted in available space far away from main patterns. The dummy-patterns resulting from the inserted dummy vias are compressed using the design-rule-checking utility to reduce the size of a graphic data system file generated from the integrated circuit design. The dummy vias can be inserted with relaxed via spacing rules. The dummy metals are inserted with a constant line-end spacing between them for better process control and the maximum length of the dummy metal can be limited for smaller coupling effects. The dummy vias can have various sizes and a square or rectangular shape.

Circuits and methods for providing a pulsed clock signal for use with pulsed latch circuits are described. A variable pulse generator is coupled to form a pulsed clock output responsive to a control signal and a clock input signal. A feedback loop is provided with a pulse monitor and a pulse control circuit. Samples of the pulsed clock signal are taken by the pulse monitor and an output is formed in the form of a pattern. The pulse control circuit receives the output of the monitor and determines whether it matches a predetermined pattern. Adjustments are made to the control signal to adaptively adjust the pulsed clock signal. The feedback loop may operate continuously. In alternative embodiments the feedback loop may be powered down. Methods for adaptively controlling a pulsed clock signal are disclosed.

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Jia-an Village, Taiwan

Chih-Chieh Chen