Industrial Technology Research Institute

National Applied Research Laboratories

Chih-Chen Lee

Kuo-Chun Chang

Jihn-Sung Lai

Yung-Bin Lin

Chien-Hsiung Tai

Tai-Kang Shing

Ping-Hsiung Wang

Chun-Chung Chen

Lu-Sheng Lee

A landform monitoring system includes a pressure sensing device mounted on a mounting frame, and including a housing unit configured with an accommodating space and having first and second openings in fluid communication with the accommodating space. A pressure sensor is attached to the housing unit, and seals the first opening. A flexible sheet is attached to the housing unit and seals the second opening. A fluid medium is filled fully in the accommodating space. When the sheet deforms as a result of an external pressure acting thereon, a pressure corresponding to the deformation of the sheet is transmitted to the pressure sensor via the fluid medium such that the pressure sensor generates a pressure sensing signal corresponding to the external pressure.

Landform monitoring system having pressure sensing devices

A method for making a thin film bulk acoustic-wave resonator (FBAR). First, define the cavity area on a substrate. Secondly, partially etch the patterned cavity area as a presacrificial layer. Thirdly, modify the nature of the presacrificial layer as a sacrificial layer, for example, using oxidization. Fourthly, polish the upper surface of the substrate and form the FBAR structure. Finally, remove the sacrificial layer to form the reflection cavity.

Method for making a thin film bulk acoustic-wave resonator

Growing community of inventors

Taipei, Taiwan

Chih-Chen Lee