Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Taiwan Semiconductor Manufacturing Comp. Ltd. (3 from 40,635 patents)
3 patents:
1. 12400834 - Cantilever with etch chamber flow design
2. 11875973 - Methods for preparing void-free coatings for plasma treatment components
3. 11404250 - Plasma etcher edge ring with a chamfer geometry and impedance design