Delta Electronics, Inc.

Chien-Yu Wang

Wei-Hsun Lai

Po-Cheng Chiu

Wei-Cheng Lin

Chih-Chun Chen

A pulsed-DC power generator is used to sputter a substrate in a chamber, and the power generator includes a first voltage source, a second voltage source, a switch unit, a control unit, and a detection unit. The control unit provides a first control signal to control the switching of the switch unit to integrate a first voltage of the first voltage source and a second voltage of the second voltage source into a pulse voltage. The control unit adjusts parameters of a first predetermined time period for arc extinction when the pulse voltage is in a working time period of the first voltage, and the number that a voltage value of the first voltage in a voltage variation to be higher than a range is higher than the number of occurrence.

Pulsed-DC power generator and method of automatically adjusting arc extinction parameters

A power supply device includes an inductor, a switch, a power supply, and a snubber circuit. A first terminal of the switch is coupled to a first terminal of the inductor. A first terminal of the power supply is coupled to a second terminal of the witch. A first terminal of the snubber circuit is coupled to the first terminal of the switch at a first voltage output terminal. A second terminal of the snubber circuit is electrically coupled to a second terminal of the power supply at a second voltage output terminal, in which the inductor, the switch, the power supply, and the snubber circuit are configured to cooperate to generate an output voltage at the first voltage output terminal and the second voltage output terminal.

Power supply device and operation method thereof

A power supply circuit includes an energy storage element, a first switch, a voltage signal converter, a second switch, a third switch and a power supply. The first switch is coupled to the energy storage element at a first voltage output terminal. The voltage signal converter is coupled to, respectively, the energy storage element and the first switch at a first converter output terminal and a second converter output terminal. The second switch is coupled to the first switch. The third switch is coupled to the second switch at a second voltage output terminal. The power supply is coupled to the second switch and the third switch. The energy storage element, the first switch, the voltage signal converter, the second switch, the third switch and the power supply cooperate and generate a output voltage. A method of operating the power supply circuit is also disclosed herein.

Power supply circuit and method of operation thereof

An arc suppression device includes an AC to DC converter, a switch, a resistor and a controller. The switch is coupled between the AC to DC converter and a plasma chamber. The resistor is coupled in parallel with the switch. The AC to DC converter is configured to convert an AC voltage into a DC voltage for providing to the plasma chamber. The controller is configured to detect a unit-time rate of change (ROC) of a plasma current received by the plasma chamber. When the controller determines that the unit-time ROC of the plasma current is larger than a first unit-time ROC threshold, the controller controls the switch to electrically isolate the AC to DC converter and the plasma chamber to reduce the plasma current to a first current value through the resistor.

Growing community of inventors

Taoyuan, Taiwan

Chien-Yu Wang