Fortrend Engineering Corporation

Fortrend Taiwan Scientific Corporation

Chien-Rong Huang

Kung Chris Wu

Kenneth Alan Hardy

Edgardo A Caliboso

Robert Frank Sifuentes

Anatoly Malobrodsky

Chen Wu

Jui-Hung Hsu

A specially adapted SMIF pod () receives and holds one particular type of reticle cassette () or reticle holder () selected from among dozens of different configurations thereof. The SMIF pod () may be interrogated to determine the particular type of reticle cassette () or reticle holder () carried therein. A reticle transfer system () receives a pair of such SMIF pods (), interrogates each of the SMIF pods () to ascertain which type of reticle cassette () or reticle holder () the SMIF pod () carries, and automatically moves reticles () through a controlled environment from one reticle cassette () or reticle holder () to another reticle cassette () or reticle holder (). A reticle reorienter () includable in the system () also permits automatically exchanging reticles () between a reticle carrier () and a reticle cassette () or reticle holder ().

Universal reticle transfer system

An identification system for tracking wafer carriers within a manufacturing facility. The system uses smart card technology in which an identification card is placed on each wafer carrier. The smart cards have memory for storing information about the wafer carrier. Power is transmitted to the card along with data so that the smart card does not require a separate power source. The devices for communicating with the smart cards can be stationary or they can be portable hand-carried devices. A network connects the readers to a central database.

Radio frequency identification device

Growing community of inventors

Hsinchu, Taiwan

Chien-Rong Huang