National Applied Research Laboratories

Tsinghua University

Chien-Pao Lin

Tsong-Pyng Perng

Chi-Chung Kei

Yang-Chih Hsueh

Chien-Nan Hsiao

Bo-Heng Liu

Kuang-I Liu

Mrinalini Mishra

Sheng-Hsin Huang

Yu-Hsuan Yu

An enclosed-channel reactor system is provided, which includes: a reactor body having a plurality of enclosed channels therein; an upper cap disposed at one end of the reactor body and having an inlet port communicating with the plurality of enclosed channels; a lower cap disposed at the other end of the reactor body opposite to the upper cap and having an outlet port communicating with the plurality of enclosed channels; and at least a conduit plate disposed between the upper cap and the reactor body for guiding a precursor injected from the inlet port into the plurality of enclosed channels uniformly.

Enclosed-channel reactor system with conduit plate

The present invention provides methods and designs of enclosed-channel reactor system for manufacturing catalysts or supports. Both of the configuration designs force the gaseous precursors and purge gas flow through the channel surface of reactor. The precursors will transform to thin film or particle catalysts or supports under adequate reaction temperature, working pressure and gas concentration. The reactor body is either sealed or enclosed for isolation from atmosphere. Another method using super ALD cycles is also proposed to grow alloy catalysts or supports with controllable concentration. The catalysts prepared by the method and system in the present invention are noble metals, such as platinum, palladium, rhodium, ruthenium, iridium and osmium, or transition metals such as iron, silver, cobalt, nickel and tin, while supports are silicon oxide, aluminum oxide, zirconium oxide, cerium oxide or magnesium oxide, or refractory metals, which can be chromium, molybdenum, tungsten or tantalum.

Enclosed-channel reactor method to manufacture catalysts or support materials

Enclosed-channel reactor system and method to manufacture catalysts or support

Growing community of inventors

Hsinchu, Taiwan

Chien-Pao Lin