Taiwan Semiconductor Manufacturing Comp. Ltd.

Chien-Mao Chen

Hung-Chih Yu

Kang-Min Kuo

Hung-Jen Hsu

Po-Shu Wang

Yu-Hsuan Kuo

Chia-Hung Lai

Yen-Bin Huang

Shih-Kai Fan

Jun Xiu Liu

Chi-Hsuen Chang

Cuker Huang

Li Huai Yang

A semiconductor device includes: a metal thin film disposed on a semiconductor substrate; and first and second contact structures disposed on the metal thin film, wherein the first and second contact structures are laterally spaced from each other by a dummy layer that comprises at least one polishing resistance material.

Thin film resistor

In an embodiment, a method includes: growing a phase change material on a platform configured for a semiconductor workpiece process; setting the phase change material to an amorphous state; performing the semiconductor workpiece process within a semiconductor processing chamber; and measuring resistance across two points along the phase change material.

Systems and methods for phase change material based thermal assessment

A semiconductor device includes: a plurality of vertical conductive structures, wherein each of the plurality of vertical conductive structures extends through an isolation layer; and an insulated extension disposed horizontally between a first one and a second one of the plurality of vertical conductive structures.

Semiconductor device extension insulation

A method includes: forming a first conductive structure in a first dielectric layer; forming a conductive protection structure that is coupled to at least part of the first conductive structure; forming a second dielectric layer over the first dielectric layer; forming a via hole extending through at least part of the second dielectric layer to expose a portion of the conductive protection structure; cleaning the via hole; and refilling the via hole with a conductive material to form a via structure.

Interconnect structure

Present disclosure provides a semiconductor stress monitoring structure, including a substrate, first conductive segments, second conductive segments, and a sensing structure. The first conductive segments are over the substrate and arranged parallel to each other. The second conductive segments are arranged below the first conductive segments and parallel to each other. The sensing structure is proximate to the substrate. The sensing structure is configured to respond to a stress caused by the first conductive segments and the second conductive segments and generate a monitoring signal.

Semiconductor stress monitoring structure and semiconductor chip

A semiconductor device includes a semiconductive substrate, a dielectric stack disposed over the semiconductive substrate, a probe pad formed on the dielectric stack, a test key embedded in the semiconductor device and a single via string stacking extending along a direction from a level of the probe pad to the semiconductive substrate and electrically connecting the periphery of the probe pad to the test key. A semiconductor device includes a semiconductive substrate, a dielectric stack, a probe pad, a test key, an extension segment electrically connected to the periphery of the probe pad and laterally extending from the probe pad from a top view, and a single via string stacking extending along a direction from the probe pad to the semiconductive substrate and electrically connecting the extension segment to the test key. The single via string stacking and the probe pad are laterally offset from a top view.

Semiconductor device and manufacturing method of the same

A method of forming a semiconductor structure includes depositing a mask layer over a substrate. The method includes etching the substrate to define a first opening. The method includes depositing a sacrificial material in the first opening. The method includes depositing a dielectric liner along sidewalls of the first opening, wherein a bottom surface of the dielectric liner contacts the sacrificial material. The method includes removing the sacrificial material. The method includes etching the substrate to enlarge the first opening to define a second opening. The second opening includes a first portion extending a first depth from the dielectric material in a first direction perpendicular to a top surface of the substrate, and a second portion extending in a second direction, parallel to the top surface of the substrate. The method includes removing the dielectric liner. The method includes filling the second opening with a dielectric material.

Method of forming shallow trench isolation structure

A semiconductor structure includes a shallow trench isolation (STI) structure. The semiconductor structure includes a substrate having a first surface. A STI structure extends from the first surface into the substrate. The STI structure includes a first portion and a second portion. The first portion extends from the first surface into the substrate, and has an intersection with the first surface. The second portion extends away from the first portion, and has a tip at a distance away from the intersection in a direction parallel to the first surface. The first portion and the second portion are filled with a dielectric material.

Shallow trench isolation structure and method of forming the same

A semiconductor device and a method for fabricating the same are disclosed. The semiconductor device comprises: a semiconductor substrate with an active area defined by a plurality of isolation features; a gate stack extending across the active area onto portions of the isolation features, wherein the gate stack comprising a gate dielectric layer on the active area and the portions of the isolation features, and a gate electrode on the gate dielectric layer; and a protective seal comprising a vertical portion lining sidewalls of the gate stack and a horizontal portion extending onto a top surface of the isolation features, wherein the horizontal portion surrounding portions of the gate stack outside the active area in a top view.

Growing community of inventors

Zhubei, Taiwan

Chien-Mao Chen