Industrial Technology Research Institute

Chinese Petroleum Corporation

Chien-Liang Hwang

Jih-Shun Chiang

Ming-Jer Kao

Po-Yuan Lo

Jeng-Hua Wei

Hung-Hsiang Wang

Shiao-Jung Chu

Jack C Ting

Ming-Jiunn Lai

Chuan Chuang

Carbon nanotubes are directly grown on a substrate surface having three metal layers thereon by a thermal chemical vapor deposition at low-temperature, which can be used as an electron emission source for field emission displays. The three layers include a layer of an active metal catalyst sandwiched between a thick metal support layer formed on the substrate and a bonding metal layer. The active metal catalyst is iron, cobalt, nickel or an alloy thereof; the metal support and the bonding metal independently are Au, Ag, Cu, Pd, Pt or an alloy thereof; and they can be formed by sputtering, chemical vapor deposition, physical vapor deposition, screen printing or electroplating.

Process of direct growth of carbon nanotubes on a substrate at low temperature

A manufacturing method of carbon nanotube transistors is disclosed. The steps include: forming an insulating layer on a substrate; forming a first oxide layer on the insulating layer using a solution with cobalt ion catalyst by spin-on-glass (SOG); forming a second oxide layer on the first oxide layer using a solution without the catalyst; forming a blind hole on the second oxide layer using photolithographic and etching processes, the blind hole exposing the first oxide layer, the sidewall of the second oxide layer, and the insulating layer; forming a single wall carbon nanotube (SWNT) connecting the first oxide layer separated by the blind hole and parallel to the substrate; and forming a source and a drain connecting to both ends of the SWNT, respectively.

Manufacturing method of carbon nanotube transistors

A purification method for obtaining high-purity PMDA. The method controls temperatures of cyclone separators in a series to separate PMDA and other by-products of different sublimation temperatures. High-purity PMDA is collected in the first cyclone separator, and no other purification steps are needed.

Purification method for obtaining high-purity PMDA

Growing community of inventors

Hsinchu, Taiwan

Chien-Liang Hwang