Marketech International Corporation

Other

Taiwan Semiconductor Manufacturing Comp. Ltd.

Chien-Kuo Lu

Ping-Hsu Chen

Chi-Yuan Pung

Hsao-Szu Chang

Chi-Ta Yeh

Chin-Hsin Peng

Jui-Cheng Lo

Chao-Jung Chang

Chien-Ling Huang

Hui-Hua Tien

Ben-Shu Chen

An active fluid static elimination system installed in a fluid transportation pipeline includes a solenoid valve, an electrostatic measuring device, a fluid destaticizer, and a controller. The solenoid valve is connected to a connecting port of the fluid transportation pipeline, and the electrostatic measuring device is used to measure an electrostatic value of a fluid in the fluid transportation pipeline. The fluid destaticizer is connected to the solenoid valve, and the controller is connected to the electrostatic measuring device and the solenoid valve. The solenoid valve is opened to allow the fluid passing through the fluid destaticizer to eliminate the electrostatic charge of the fluid when the controller determines that the electrostatic value measured by the electrostatic measuring device is greater than a predetermined value.

Active fluid static elimination system

A multifunction cap replacement module includes a cap rotation module supporter and at least one cap rotation module. The cap rotation module is mounted to the cap rotation module supporter, and the cap rotation module includes a first cap rotation device and a second cap rotation device. The first cap rotation device is configured to open one sealing cap of at least one chemical drum and extract a chemical liquid from the chemical drum, and the second cap rotation device is configured to open another one sealing cap of the chemical drum and allow the chemical liquid to flow back to the chemical drum.

Multifunction cap replacement module

A cap rotation device includes a cap rotator, a liquid transferring device and an optical detecting device. The liquid transferring device is disposed near the cap rotator, and the optical detecting device is disposed between the cap rotator and the liquid transferring device. The optical detecting device is used to detect a position of a sealing cap of a chemical drum to guide the cap rotator aligning with the sealing cap. Therefore, the sealing cap is opened by the cap rotator, and then the chemical liquid is transferred by the liquid transferring device.

Cap rotation device

An automatic cover-opening and connector-replacing device for chemical container is disclosed. The device solves the problems of toxic substance leakage and even industrial safety accidents like gas explosions due to aging equipment during the maintenance by operating personnel in high-risk operation areas. The automatic cover-opening and connector-replacing device for chemical container mainly includes a machine, a lifting device provided inside the machine, a cover-opening device connected with the lifting device and a liquid-pumping device connected with the lifting device. The cover-opening device is provided for assembling and disassembling the internal cover of a chemical container and the liquid-pumping device is provided for pumping the content of the chemical container where the lifting device is provided for adjusting the distance between the cover-opening device, liquid-pumping device and chemical container.

Automatic cover-opening and connector-replacing device for chemical container

An inner static electricity eliminating control valve for organic solvent delivery pipelines is disclosed. The inner static electricity eliminating control valve is to be installed on and connected to an organic solvent delivery pipeline, to eliminate the inner static electricity generated by the organic solvent inside the organic solvent delivery pipeline. The inner static electricity eliminating control valve includes a valve casing, a main valve chamber, a pneumatic valve, a subsidiary valve chamber, a check valve, a static electricity export mechanism and a solvent export portion, wherein, the pneumatic valve can periodically apply pressure toward the organic solvent inside the main valve chamber, so that the organic solvent inside the main valve chamber can be delivered periodically through the check valve to the subsidiary valve chamber, and during this process, the static electricity export mechanism will export and eliminate the static electricity existing in the organic solvent.

Inner static electricity eliminating control valve for organic solvent delivery pipelines

A DMHC (dual mode hybrid control) system and method which facilitates enhanced control in the delivery of polishing slurry to a CMP (chemical mechanical polishing) apparatus. The DMHC comprises a linear table and a PID (proportional integrated differential) controller operably connected to a slurry pump provided in a slurry flow conduit which delivers the polishing slurry to the CMP apparatus. A bubble trap and a flowmeter provided in the slurry flow conduit downstream of the slurry pump are operably connected to the PID controller, and the CMP apparatus is located downstream of the flowmeter.

Dual mode hybrid control and method for CMP slurry

A system for controlling and monitoring a rate of flow of a fluid, such as a CMP slurry, comprising a pump for pumping the slurry; a flow meter for monitoring the rate of flow of the slurry; and a controller operably connected to the flow meter and the pump. The controller receives signals from the flow meter indicating the rate of flow of the slurry and controls the operational speed of the pump responsive to the flow meter signals. A degasser equipped with a level sensor may be further provided in the system for removing gas bubbles from the slurry.

Growing community of inventors

Hsinchu, Taiwan

Chien-Kuo Lu