Taiwan Semiconductor Manufacturing Comp. Ltd.

Chien-Fu Tseng

Wei-Cheng Wu

Chen-Hua Douglas Yu

Hsien-Wei Chen

Der-Chyang Yeh

Chi-Hsi Wu

Tsung-Shu Lin

Tsung-Yu Chen

Li-Han Hsu

Che-Yu Yeh

A stacked via structure disposed on a conductive pillar of a semiconductor die is provided. The stacked via structure includes a first dielectric layer, a first conductive via, a first redistribution wiring, a second dielectric layer, a second conductive via, and a second redistribution wiring. The first dielectric layer covers the semiconductor die. The first conductive via is embedded in the first dielectric layer and electrically connected to the conductive pillar. The first redistribution wiring covers the first conductive via and the first dielectric layer. The second dielectric layer covers the first dielectric layer and the first redistribution wiring. The second conductive via is embedded in the second dielectric layer and landed on the first redistribution wiring. The second redistribution wiring covers the second conductive via and the second dielectric layer. A lateral dimension of the first conductive via is greater than a lateral dimension of the second conductive via.

Stacked via structure disposed on a conductive pillar of a semiconductor die

Semiconductor device packages, packaging methods, and packaged semiconductor devices are disclosed. In some embodiments, a package for a semiconductor device includes an integrated circuit die mounting region and a molding material around the integrated circuit die mounting region. An interconnect structure is over the molding material and the integrated circuit die mounting region. A protection pattern is in a perimeter region of the package around the interconnect structure. The protection pattern includes a first conductive feature that is vertical within the package near a second conductive feature. The first conductive feature has a first width, and the second conductive feature has a second width. The second width is greater than the first width.

Semiconductor device packages, packaging methods, and packaged semiconductor devices

Growing community of inventors

Taipei, Taiwan

Chien-Fu Tseng