Olympus Optical Company, Ltd.

Chiaki Sato

Kiyozo Koshiishi

Sadao Shigetomi

Eiichi Sato

Akitoshi Toda

Shohei Kobayashi

Makoto Yoshinaga

Terumasa Morita

Chikara Nagano

Tsugiko Takase

Shuzo Mishima

Eishi Ikuta

Syunpei Tanaka

Ikuo Tofukuji

Mitunori Kubo

Scanning tunnel microscope

Light emitted from a semiconductor laser is collimated by a collimator lens into a parallel beam. The parallel beam enters a phase plate which provides a phase difference of .pi. to a half of the beam. The beam, which has passed through the phase plate, enters an objective lens and is converged onto an optical disc. The optical disc has a number of mark sets along the track, each mark set comprising optically detectable two marks. The beam from the optical disc is collected into the objective lens and is reflected by a polarized beam splitter into a light detector. The output from a light-element of the light detector is delivered to a differential amplifier and a summing amplifier. The outputs from the differential amplifier and summing amplifier are input to a divider. The output from the divider is delivered to an information reproducing unit. The information reproducing unit reproduces information recorded on the optical disc on the basis of the input, and outputs the reproduced information.

Optical information reproducing apparatus and recording medium

A laser beam emitted from a laser diode 12 is converted to parallel beams through a collimator lens 14. The beams pass through a stop 15, a polarizing beam splitter 16 and a .lambda./4 plate 18. The beams are then converged on an optical disc 22 through an objective lens 20 and diffracted by mark set provided on the disc 22. The diffracted beams reflected by the disc 22 enter the objective lens 20, pass through the .lambda./4 plate 18, are reflected by the polarizing beam splitter 16, and are divided into two parts by a half mirror 24. The reflected part of the beams enters a data reproducing detector 26, and the transmitted part of the beams enters a tracking servo detector 27.

Optical high density data reproducing apparatus using interference

A fine surface profile meter includes an X-Y stage, supported by a leaf spring, for supporting a sample thereon, a piezoelectric actuator for two-dimensionally scanning the X-Y stage, a positioning table, disposed below the X-Y stage, for positioning the X-Y stage at an arbitrary position, an objective lens disposed above the X-Y stage, an observation optical system for allowing an operator to observe an enlarged sample image, a measurement optical system, an optical axis of which is aligned with an optical path of the objective lens through a beam splitter, the measurement optical system for emitting a laser beam onto the sample through the objective lens and to receive the laser beam reflected by the sample, a calculator circuit for calculating height information of the sample using an output from the measurement optical system and for obtaining a two-dimensional distribution of the height information, a cover for shielding the X-Y stage, the positioning means, the objective lens, the beam splitter, the observation optical system, and the measurement optical system from an outer atmosphere, a detachable measurement unit for integrally holding the objective lens, the beam splitter, and the measurement optical system, a supporting plate supported on the X-Y stage through columns, and an arm, mounted on the supporting plate, for supporting the measurement optical system and the observation optical system.

Fine surface profile measuring apparatus

Growing community of inventors

Tokyo, Japan

Chiaki Sato