Fujitsu Corporation

Chiaki Furukawa

Hajime Sato

Akihiro Iwase

Akira Sugiura

Isaya Sobue

Tohru Yasuda

Seiji Yamamoto

Hirosuke Koumyoji

Mikio Ishikawa

A multi-bus semiconductor device and a method of its probing test perform the DC test for individual pads of a device while dealing with an adequate number of devices for simultaneous measurement based on the scheme of input/output pad number compressive test. The semiconductor device includes switch elements SW-SWconnected between input/output pads P-Pand a testing line Lso that pads in an arbitrary combination, among the off-probe pads P-Pthat are not made in contact with the tester probe Pr, are selected for testing in correspondence to the combination of switch elements that are turned on. The input/output buffers of the pads under test are deactivated to block their internal current paths. The corresponding switch elements are turned on to connect the off-probe pads under test to the probe pad Pthat is made in contact with the tester probe Pr, and the leak current of the probes is measured with the tester TS.

Semiconductor device and test method for the same

A multi-bus semiconductor device and a method of its probing test perform the DC test for individual pads of a device while dealing with an adequate number of devices for simultaneous measurement based on the scheme of input/output pad number compressive test. The semiconductor device includes switch elements SW-SWconnected between input/output pads P-Pand a testing line Lso that pads in an arbitrary combination, among the off-probe pads P-Pthat are not made in contact with the tester probe Prare selected for testing in correspondence to the combination of switch elements that are turned on. The input/output buffers of the pads under test are deactivated to block their internal current paths. The corresponding switch elements are turned on to connect the off-probe pads under test to the probe pad Pthat is made in contact with the tester probe Prand the leak current of the probes is measured with the tester TS.

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Kasugai, Japan

Chiaki Furukawa