Tsinghua University

Taiwan Semiconductor Manufacturing Comp. Ltd.

Chia-Tung Kuo

Tri-Rung Yew

Chun-Te Ho

Yun-Chen Tsai

Yi-Ting Lee

Tien-Chi Ji

Kai-Wei Lan

Hsin-Chang Lee

Pei-Cheng Hsu

Wei-Hao Lee

Ting-Pi Sun

A pellicle assembly includes a pellicle membrane with a nanotube layer formed from thick nanotube bundles. The pellicle membrane can be formed with multiple layers and has a combination of long lifetime, high transmittance, low deflection, and small pore size. A conformal coating may applied to an outer surface of the pellicle membrane. The conformal coating protects the pellicle membrane from damage that can occur due to heat and hydrogen plasma created during EUV exposure.

Pellicle membrane with improved properties

An anode material for a secondary battery is provided. The anode material for the secondary battery includes a metal oxide containing four or more than four elements, or an oxide mixture containing four or more than four elements. The metal oxide includes cobalt-copper-tin oxide, silicon-tin-iron oxide, copper-manganese-silicon oxide, tin-manganese-nickel oxide, manganese-copper-nickel oxide, or nickel-copper-tin oxide. The oxide mixture includes the oxide mixture containing cobalt, copper and tin, the oxide mixture containing silicon, tin and iron, the oxide mixture containing copper, manganese and silicon, the oxide mixture containing tin, manganese and nickel, the oxide mixture containing manganese, copper and nickel, or the oxide mixture containing nickel, copper and tin.

Anode material for secondary battery, anode for secondary battery and secondary battery

Growing community of inventors

Hsinchu, Taiwan

Chia-Tung Kuo