Industrial Technology Research Institute

Chia-Jen Ting

Chun-Fa Lan

Yu-Nan Pao

Hung-Yin Tsai

Hui-Hsiung Lin

Chii-Chang Chen

Ta-Hsin Chou

Tsung-Hsin Lin

Wen-Hsun Yang

Shih-Shian Ho

Hsieh Min-Lang

A vibration assistant polishing module which comprises a polishing disk, a workpiece carrier tray, a linear guide way mechanism, a linkage, a motor and an adjustable eccentricity mechanism. The linear guide way mechanism includes a slide, a guide seat and a guide rod. The slide is pivot jointed with workpiece carrier tray and engaged in guide seat. The adjustable eccentricity mechanism comprises a base which is connected with a power shaft of the motor, and a pivot shaft of base and linkage is eccentric to the power shaft. The power shaft drives the base rotating and the linkage swinging eccentrically, and the slide moves linearly according to the limitation from guide seat, and a horizontal radial vibration and low frequency vibration is generated on the workpiece carrier tray, so the low frequency vibration is generated on the surface of the workpiece which is touched with the polishing disk.

Vibration assistant polishing module

A light concentrating module includes an optical film having a light incident surface and a light outgoing surface facing the light incident surface, an optical wedge element having a first surface, a second surface facing the first surface and having an angle with respect to the first surface and a third surface adjacent to the first and second surfaces, and at least one photoelectric chip disposed near the third surface. Light from a light source penetrates the optical film, and the light enters the first surface of the optical wedge element by an appropriate incident angle and has total reflection between the first and second surfaces, whereby the light propagates in the optical wedge element, and the light leaves the optical wedge element from the third surface and is received by the photoelectric chip.

Light concentrating module

A method for manufacturing a bonded wafer with ultra-thin single crystal ferroelectric film is provided, comprising the following steps: providing a single crystal ferroelectric wafer and a carrier wafer while activating the surfaces of the single crystal ferroelectric wafer and the carrier wafer; bonding the activated surface of the single crystal ferroelectric wafer to the activated surface of the carrier wafer; and thinning the single crystal ferroelectric wafer for forming an ultra-thin single crystal ferroelectric film. Wherein, the thinning process in the aforesaid preferred embodiment is the method of polishing, grinding, chemical mechanical polishing, or etching. And the bonding force generated in the bonding process is strong enough to resist the shearing force.

Method for manufacturing bonded wafer with ultra-thin single crystal ferroelectric film

A locking mechanism of zoom lens which is primarily applied on zoom lens to prevent the lens group of the zoom lens to prevent the lens group of the zoom lens structure from entering into the non-zooming zone of the curvilinear slots through its zooming zone. The said locking mechanism of zoom lens mainly consists of a reverse rotation stopping block, a spring-loaded restoring slider, a stopping piece and a cap. Among them, the reverse rotation stopping block is fixed at the linear-slot-sleeve in the said zoom lens structure through the transverse slot of curvilinear-slot-sleeve and the outer sleeve in the said zoom lens structure; the cap is fixed on the said stopping block, and the said stopping piece has one end with inclined plane which can make the reverse rotation stopping block to move, only in one direction, along the transverse slots on the curvilinear-slot-sleeve and its outer sleeve and enable the lens group of the said zoom lens structure to enter into the zooming operation zone of the said curvilinear-slot-sleeve through the non-zooming operation zone of the said curvilinear-slot-sleeve to perform zooming action. Whenever one does not need to use the zoom lens, one can press the cap directly to make the inclined plane's end retreat from the transverse slot of the outer sleeve which, in sequence, makes the lens group enter the zooming operation zone of the said curvilinear slots through the non-zooming operation zone of the said curvilinear slots to attain the object of shortening the zoom lens.

Locking mechanism of zoom lens

Growing community of inventors

Hsinchu County, Taiwan

Chia-Jen Ting