Taiwan Semiconductor Manufacturing Comp. Ltd.

Jarllytec Co., Ltd.

Chia-Han Lin

Chien-Fa Lee

Jiun-Rong Pai

Hsu-Shui Liu

Shou-Wen Kuo

Sheng-Hsiang Chuang

Chien-Ko Liao

Wu-An Weng

Ya Hsun Hsueh

Gary Tsai

Becky Liao

Ethan Yu

Surendra Kumar Soni

Ming-Chi Tsai

Kuo-Yi Liu

Yung-Ta Lee

Yuan-Yu Feng

Yi-Tang Huang

Meng-Jen Pan

Some embodiments of the present disclosure relate to a processing tool. The tool includes a housing enclosing a processing chamber, and an input/output port configured to pass a wafer through the housing into and out of the processing chamber. A back-side macro-inspection system is arranged within the processing chamber and is configured to image a back side of the wafer. A front-side macro-inspection system is arranged within the processing chamber and is configured to image a front side of the wafer according to a first image resolution. A front-side micro-inspection system is arranged within the processing chamber and is configured to image the front side of the wafer according to a second image resolution which is higher than the first image resolution.

Automated inspection tool

A method for transferring a container configured to hold at least one article used in semiconductor fabrication is provided. The method includes moving a transferring mechanism to a first position that is adjacent to the original space; producing an image of an edge of the container that is adjacent to the original space using an optical receiver before the container is moved to a destination space; and performing an image analysis of the image to determine whether to move the container to the destination space.

Method for transferring container

A method for transferring a container for holding one or more articles is provided. The method includes transferring the container using a transferring mechanism to a position which is adjacent to a destination space. The method further includes recording an image of the destination space before the container is deposited to the destination space. The method also includes performing an image analysis of the image and determining if the container is able to be sent to the destination space according to a result of the image analysis of the image.

The present invention relates to an insertion device having recovering mechanism, which comprises: a support formed with an accommodation hole; a sliding rod capable of being elastically moved relative to the support; and a recovering mechanism. The recovering mechanism is installed with a spring accommodated in the accommodation hole, an actuation unit disposed above the spring, and the bottom of the actuation unit is formed with a stop plate, the spring enables the actuation unit to be moved upwardly/downwardly thereby enabling the stop plate to stop the sliding rod at a first position or release the sliding rod at a second position. Accordingly, the recovering mechanism is suitable to be installed in a smaller space.

Insertion device having recovering mechanism

The present invention discloses a hinge structure with changeable frictional faces, comprising a spindle socketingly disposed with a first enclosing part and a second enclosing part with the openings of the first and second enclosing parts pointing to the same direction to change the frictional face for torsion from the second enclosing face to the first enclosing part and thus to extend the service life and further to form a frictional face with four steps of different torsions to meet the demands of customers.

Hinge structure with changeable frictional faces

A vertically adjustable supporting structure that comprises a link member whose bottom and top portions disposed with a lower end and a top end; a lower hinge having at least one shaft pivoted on the lower end of the link member so as to render the link member rotatably pivoted between the two lower frames of the lower hinge; an upper hinge having at least one shaft pivotally connected on the upper end of the link member so as to render the link member rotatably pivoted between the two upper frames of the upper hinge; at least a coupling assembly having one lower axle wheel and one upper axle wheel disposed between the lower end and the upper end of one side of the link member and between the lower frame and upper frame, respectively, and pivoted on the lower hinge and upper hinge, respectively, with a flexible cord engagingly secured between the lower and upper axle wheels; and at least an idle wheel pivoted on one side of the link member and between the lower and upper axle wheels to be interlacing engaged with the flexible cord and to form a coupling movement, such that the coupling assembly transforms the circular movement of the link member into a rotation for compensating displacement difference of two upper frames without affecting their original angle.

Vertically adjustable supporting structure

An elevation-adjustable support structure includes a connecting member, a bottom hinge structure, which comprises two bottom brackets, and a shaft fastened to the bottom brackets and pivoted to the bottom end of the connecting member for allowing the connecting member to be turned about the shaft between the two bottom brackets, a top hinge structure, which comprises two top brackets and two shafts respectively fastened to the top brackets and pivoted to the top end of the connecting member for allowing the connecting member to be turned about the shafts between the two top brackets; and two linking mechanisms each having a top wheel and a bottom wheel respectively coupled between the top end of the connecting member and the top brackets and the bottom end of the connecting member and the bottom brackets and a flexible belt member coupled between the top wheel and the bottom wheel for maintaining the angle of inclination of the top brackets upon a rotary motion of the connecting member relative to the top hinge structure and the bottom hinge structure.

Growing community of inventors

Taipei, Taiwan

Chia-Han Lin