Taiwan Semiconductor Manufacturing Comp. Ltd.

Chia-Fu Tsai

Hsueh-Cheng Lin

Tung-Gan Cheng

Yaw-Wen Wu

Chin-Chen Chang

Jung-Huang Peng

Cheng-Chao Lin

Chih-Jung Yeh

Ray-Wen Tsai

Zhen-Dao Shen

Hung-Tse Huang

Yi-Yu Liu

Andrew Lin

Tung-Liang Wua

Tung-Liang Wu

A lock structure. The lock structure includes a first element, a second element, a guiding element and a fixing pin. The first element has a guide hole and a first through hole located under the guide hole. The second element is deposed under the first element and has a second through hole that is co-axially aligned with the first through hole. The guiding element rotates and is movably disposed in the guide hole. The guiding element has a third through hole aligned with the first through hole. The fixing pin is inserted through the third through hole, guide hole, first through hole and second through hole and has a first retaining portion. The first retaining portion is formed on the lower portion of the fixing pin and located under the second element.

Lock structure and method for using thereof

An apparatus and method for adjusting the position of a load port utilized in a semiconductor wafer processing system. Generally, a door opener can be configured for opening a door through which a semiconductor wafer may enter for subsequent positioning and processing thereof by a semiconductor wafer processing system. A load port is associated with the door opener. A calibration mechanism can then be utilized for calibrating the load port for leveling and height positioning, such that a plurality of directional axis associated with the load port do not interfere with one another, thereby conserving calibration time while permitting a single individual to perform calibration operations thereof.

Precise mechanism for load port adjustment

An apparatus and a method for aligning a loadport on a process machine are disclosed. The apparatus is constructed by a base plate, an alignment block mounted on the base plate, a light source and an optical detector. The alignment block is provided with an aperture extending longitudinally through the block, or formed in a T-shape extending both longitudinally and transversely through the block. The light source may be suitably a laser emission source, or a laser source that operates in a pulse mode. The diameter of the aperture provided in the alignment block should be sufficiently small, i.e. smaller than 5 mm, and preferably smaller than 3 mm.

Optically aligning a loadport on a process machine by transmitting light through a system of apertures

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Tainan, Taiwan

Chia-Fu Tsai