Taiwan Semiconductor Manufacturing Comp. Ltd.

Chia-En Huang

Yih Wang

Meng-Sheng Chang

Meng-Han Lin

Yi-Ching Liu

Chieh Lee

Chun-Ying Lee

Yen-Huei Chen

Hidehiro Fujiwara

Yao-Jen Yang

Chien-Ying Chen

Wen-Chang Cheng

Sai-Hooi Yeong

Jonathan Tsung-Yung Chang

Shao-Yu Chou

Gu-Huan Li

Kuan-Lun Cheng

Ching-Wei Tsai

Cheng Hung Lee

Han-Jong Chia

Yu-Xuan Huang

Chia-Ta Yu

Fu-An Wu

Jui-Che Tsai

Jung-Ping Yang

Yen-Jen Chen

Chih-Chieh Chiu

Haruki Mori

Chien-Yu Huang

Martin Liu

I-Han Huang

Tung-Cheng Chang

Chien-Chi Tien

Perng-Fei Yuh

Feng-Lun Chen

Hua-Tai Shieh

Philex Ming-Yan Fan

Kuan-Chung Chiu

Wei-Hua Chen

A semiconductor device is disclosed. The semiconductor device includes a fin-based structure formed on a substrate. The semiconductor device includes a plurality of first nanosheets, vertically spaced apart from one another, that are formed on the substrate. The semiconductor device includes a first source/drain (S/D) region electrically coupled to a first end of the fin-based structure. The semiconductor device includes a second S/D region electrically coupled to both of a second end of the fin-based structure and a first end of the plurality of first nanosheets. The semiconductor device includes a third S/D region electrically coupled to a second end of the plurality of first nanosheets. The fin-based structure has a first crystal lattice direction and the plurality of first nanosheets have a second crystal lattice direction, which is different from the first crystal lattice direction.

Memory devices and methods of manufacturing thereof

A semiconductor device includes a substrate, an active structure, a memory structure, and a first conductive line. The active structure is disposed on the substrate. The memory structure is disposed over the active structure, and has a lower surface and an upper surface opposite to each other. The memory structure includes a deep via disposed in the memory structure, and extends in an upward direction from the lower surface to terminate at the upper surface. The first conductive line is disposed above the upper surface of the memory structure, and extends in a first lengthwise direction transverse to the upward direction. The first conductive line is electrically connected to the active structure through the deep via. A method for manufacturing the semiconductor device is also disclosed.

Memory structure having novel circuit routing and method for manufacturing the same

A memory device includes a programming gate-strip, a read gate-strip, and an array of one-bit memory cells. Each one-bit memory cell includes an anti-fuse structure, a transistor, a terminal conductor, a group of programming conducting lines, and a bit connector. The anti-fuse structure has a dielectric layer overlying a semiconductor region in an active zone at an intersection of the programming gate-strip and the active zone. The transistor has a channel region in the active zone at an intersection of the read gate-strip and the active zone. The terminal conductor overlies a terminal region of the transistor in the active zone. The group of programming conducting lines is conductively connected to the programming gate-strip through a group of one or more gate via-connectors. The bit connector is conductively connected to the terminal conductor through one or more terminal via-connectors.

Memory device with improved anti-fuse read current

An SRAM cell includes a first n-type channel (n-channel) layer engaged with a first gate layer to form a first device; a first p-type channel (p-channel) layer engaged with the first gate layer to form a second device, the first gate layer stacked between the first n-channel layer and the first p-channel layer along a first direction; a second n-channel layer engaged with a second gate layer to form a third device, the second gate layer coupled to a first word line and the second n-channel layer coupled to the first n-channel layer along a second direction perpendicular to the first direction; a third n-channel layer engaged with a third gate layer to form a fourth device, the third n-channel layer spaced from the second n-channel layer along a third direction perpendicular to the first direction and the second direction; a second p-channel layer engaged with the third gate layer to form a fifth device, the third gate layer stacked between the third n-channel layer and the second p-channel layer along the first direction; and a fourth n-channel layer engaged with a fourth gate layer to form a sixth device, the fourth gate layer coupled to a second word line and the fourth n-channel layer coupled to the third n-channel layer along the second direction.

Structures of sram cell and methods of fabricating the same

A semiconductor device includes a transistor that is disposed on a substrate. The transistor includes a gate electrode located over the substrate, a gate dielectric disposed on the gate electrode, a channel layer disposed on the gate dielectric, a first source/drain contact disposed on the channel layer and located on a side of the channel layer that is opposite to the substrate, and a second source/drain contact disposed on the channel layer and located on a side of the channel layer that faces the substrate. One of the gate dielectric and the channel layer at least partially surrounds the other one of the gate dielectric and the channel layer. A region of the channel layer between the first source/drain contact and the second source/drain contact is elongated in a direction perpendicular to the substrate.

Semiconductor device with a vertical channel wrapped around gate, and method for manufacturing the same

The present disclosure is directed to methods for the formation of high-voltage nano-sheet transistors and low-voltage gate-all-around transistors on a common substrate. The method includes forming a fin structure with first and second nano-sheet layers on the substrate. The method also includes forming a gate structure having a first dielectric and a first gate electrode on the fin structure and removing portions of the fin structure not covered by the gate structure. The method further includes partially etching exposed surfaces of the first nano-sheet layers to form recessed portions of the first nano-sheet layers in the fin structure and forming a spacer structure on the recessed portions. In addition, the method includes replacing the first gate electrode with a second dielectric and a second gate electrode, and forming an epitaxial structure abutting the fin structure.

High-voltage nano-sheet transistor

A memory circuit includes a boundary layer, a first circuit positioned on a first side of the boundary layer and including a DRAM array including a plurality of DRAM cells, a second circuit positioned on a second side of the boundary layer opposite the first side and including a computation circuit, the computation circuit including a sense amplifier circuit, and a plurality of bit lines coupled to the plurality of DRAM cells and the sense amplifier circuit. Each bit line of the plurality of bit lines includes a via structure positioned in the boundary layer and the plurality of DRAM cells of the first circuit positioned on the first side of the boundary layer is an entirety of the DRAM cells of the memory circuit coupled to the sense amplifier circuit.

DRAM computation circuit and method

Disclosed herein are systems, methods and apparatuses related to a memory array. In one aspect, the memory array includes a set of resistive storage circuits including a first subset of resistive storage circuits connected between a first local line and a second local line in parallel. The first local line and the second local line may extend along a first direction. In one aspect, for each resistive storage circuit of the first subset of resistive storage circuits, current injected at a first common entry point of the first local line exits through a first common exit point of the second local line, such that each resistive storage circuit of the first subset of resistive storage circuits may have same or substantial equal resistive loading.

Memory including metal rails with balanced loading

A memory device includes a bit line, a word line, a memory cell including a capacitor and a transistor, and a controller. The transistor has a gate terminal coupled to the word line, a first terminal, and a second terminal. The capacitor has a first end coupled to the first terminal of the transistor, a second end coupled to the bit line, and an insulating material between the first end and the second end. The controller, in a programming operation, applies a turn-ON voltage via the word line to the gate terminal of the transistor to turn ON the transistor, and applies a program voltage via the bit line to the second end of the capacitor to apply, while the transistor is turned ON, a predetermined break-down voltage or higher between the first end and the second end of the capacitor to break down the insulating material of the capacitor.

Memory device, integrated circuit device and method

One aspect of this description relates to a memory array. In some embodiments, the memory array includes a first memory cell coupled between a first local select line and a first local bit line, a second memory cell coupled between a second local select line and a second local bit line, a first switch coupled to a global bit line, a second switch coupled between the first local bit line and the first switch, and a third switch coupled between the second local select line and the first switch.

Using embedded switches for reducing capacitive loading on a memory system

A method (of writing to a ferroelectric field-effect transistor (FeFET) configured as a 2-bit storage device that stores two bits, wherein the FeFET includes a first source/drain (S/D) terminal, a second S/D terminal, a gate terminal and a ferroelectric layer, a second bit being at a first end of the ferroelectric layer, the first end being proximal to the first S/D terminal) includes: setting the second bit to a logical 1 value, the setting a second bit including applying a gate voltage to the gate terminal, and applying a first source/drain voltage to the second S/D terminal; and wherein the first source/drain voltage is lower than the gate voltage.

Method of writing to or erasing multi-bit memory storage device

A semiconductor die comprises a device portion comprising: an array of active memory devices extending in a first direction, and interface portions located adjacent to axial ends of the device portion in the first direction. The interface portions have a staircase profile in a vertical direction and comprise an array of dummy memory devices and an array of gate vias. The dummy memory devices are axially aligned with the active memory devices in the first direction, each dummy memory device comprising at least one interface via. Moreover, each row of the array of gate vias extends in the first direction and is located parallel to a row of the array of dummy memory devices in a second direction perpendicular to the first direction. Each gate via is electrically coupled to the at least one interface via of a dummy memory device located adjacent thereto.

Semiconductor memory devices and methods of manufacturing thereof

A semiconductor device includes a substrate and a memory structure disposed over the substrate. The memory structure includes a pair of first conductive lines, a channel element disposed between the pair of the first conductive lines and formed with an air gap therein, a first memory element disposed to separate one of the pair of the first conductive lines from the channel element, and a second memory element disposed to separate the other one of the pair of the first conductive lines from the channel element. A method for manufacturing the semiconductor device is also disclosed.

Memory structure having air gap and method for manufacturing the same

A memory device includes two word-line electrodes, two source-line electrodes, and two data storage features for use by four memory cells, which are referred to as first, second, third and fourth memory cells. One word-line electrode is common to the first and second memory cells, and the other word-line electrode is common to the third and fourth memory cells. One source-line electrode is common to the first and second memory cells, and the other source-line electrode is common to the third and fourth memory cells. One data storage feature is common to the first and third memory cells, and the other data storage feature is common to the second and fourth memory cells.

Memory device

A method of operating a memory circuit includes turning on a first programming device and turning on a first selection device thereby causing a first current to flow through a first fuse element. The first fuse element is coupled between the first selection device and the first programming device. The method further includes turning off a second programming device and turning off a second selection device, and blocking the first current from flowing through a second fuse element that is coupled between the second selection device and the first programming device.

Growing community of inventors

Hsinchu, Taiwan

Chia-En Huang