Taiwan Semiconductor Manufacturing Comp. Ltd.

Chia-en Huang

Yih Wang

Meng-Han Lin

Meng-Sheng Chang

Yi-Ching Liu

Shih-Lien Linus Lu

Yao-Jen Yang

Sai-Hooi Yeong

Yu-Ming Lin

Kuan-Lun Cheng

Chung-Te Lin

Ching-Wei Tsai

Feng-Cheng Yang

Cheng Hung Lee

Han-Jong Chia

Bo-Feng Young

Sheng-Chen Wang

Yu-Xuan Huang

Jui-Che Tsai

Perng-Fei Yuh

Gu-Huan Li

Chun-Ying Lee

Chieh Lee

Tung-Cheng Chang

Wan-Hsueh Cheng

Ping-Wei Wang

Po-Hsiang Huang

Jonathan Tsung-Yung Chang

Atul Katoch

Yu-Kuan Lin

Ching-Wei Wu

Yi-Hsun Chiu

Hsin-Wen Su

Kao-Cheng Lin

Ming-Hung Chang

Saman M I Adham

Hao-I Yang

Wen-Sheh Huang

Lien-Jung Hung

Donald George Mikan, Jr

Yu-Hsiang Chen

Sai-hooi Yeong

Ming-Chien Tsai

Tsung-Yung Chang

Tzu-hsien Yang

Uppu Sharath Chandra

Hsing-Leo Tsai

Wen-Chang Cheng

Ji Kuan Lee

Min-Chiao Yeh

A device includes a word line, a dielectric layer, a gate dielectric layer, a semiconductive layer, a source line, and a memory stack. The word line is over a substrate. The dielectric layer is over the word line and has inner sidewalls over the word line. The gate dielectric layer is in contact with the word line and lines a top surface and inner sidewalls of the dielectric layer. The semiconductive layer is conformally over the gate dielectric layer. The semiconductive layer includes a source portion, a drain portion, and a channel portion. The source portion and the drain portion are over the top surface of the dielectric layer. The channel portion interconnects the source portion and the drain portion and in at a position lower than the source portion. The source line and the memory stack are respectively over the source portion and the drain portion.

Memory device and manufacturing method thereof

A ferroelectric memory device and a memory array are provided. The ferroelectric memory device includes a word line; a pair of source/drain electrodes, a channel layer, a work function layer and a ferroelectric layer. The source/drain electrodes are disposed at opposite sides of the word line, and elevated from the word line. The channel layer has a bottom planar portion and wall portions. The bottom planar portion extends along a top surface of the word line, and opposite ends of the bottom planar portion are connected to sidewalls of the source/drain electrodes through opposite ones of the wall portions. The work function layer is electrically connected to the word line, and extends along the bottom planar portion and the wall portions of the channel layer. The ferroelectric layer separates the channel layer from the work function layer.

Ferroelectric memory device and memory array

Disclosed is an input/output circuit for a physical unclonable function generator circuit. In one embodiment, a physical unclonable function (PUF) generator includes: a PUF cell array comprising a plurality of bit cells configured in a plurality of columns and at least one row, and at least one input/output (I/O) circuit each coupled to at least two neighboring columns of the PUF cell array, wherein the at least one I/O circuit each comprises a sense amplifier (SA) with no cross-coupled pair of transistors, wherein the SA comprises two cross-coupled inverters with no access transistor and a SA enable transistor, and wherein the at least one I/O circuit each is configured to access and determine logical states of at least two bit cells in the at least two neighboring columns; and based on the determined logical states of the plurality of bit cells, to generate a PUF signature.

I/O circuit design for SRAM-based PUF generators

A memory device includes a substrate, an active region, a first gate structure, a second gate structure, a first word line, and a second word line. The active region protrudes from a top surface of the substrate. The active region has at least one ring structure, in which when viewed from above, the ring structure has a first linear portion, a second linear portion, a first curved portion, and a second curved portion, the first curved portion connects first sides of the first and second linear portions, and the second curved portion connects second sides of the first and second linear portions. The first gate structure and the second gate structure are over the substrate and cross the active region. The first word line and the second word line are electrically connected to the first gate structure and the second gate structure, respectively.

Memory device and method for forming the same

A semiconductor structure includes a power rail, a first source/drain feature disposed over the power rail, a via connecting the power rail to the first source/drain feature; an isolation feature disposed over the first source/drain feature, and a second source/drain feature disposed over the isolation feature, where the first and the second source/drain features are of opposite conductivity types.

Stacking CMOS structure

An exemplary testing environment can operate in a testing mode of operation to test whether a memory device or other electronic devices communicatively coupled to the memory device operate as expected or unexpectedly as a result of one or more manufacturing faults. The testing mode of operation includes a shift mode of operation, a capture mode of operation, and/or a scan mode of operation. In the shift mode of operation and the scan mode of operation, the exemplary testing environment delivers a serial input sequence of data to the memory device. In the capture mode of operation, the exemplary testing environment delivers a parallel input sequence of data to the memory device. The memory device thereafter passes through the serial input sequence of data or the parallel input sequence of data to provide an output sequence of data in the shift mode of operation or the capture mode of operation or passes through the serial input sequence of data to provide a serial output sequence of scan data in the scan mode of operation.

Scan synchronous-write-through testing architectures for a memory device

One aspect of this description relates to a semiconductor device. In some embodiments, the semiconductor device includes a first drain/source structure extending in a first direction, a second drain/source structure extending the first direction and spaced from the first drain/source structure in a second direction perpendicular to the first direction, a third drain/source structure extending in the first direction and spaced from the second drain/source structure in the second direction, a first bit line disposed over the first drain/source structure in the first direction, a common select line that includes a portion disposed over the second drain/source structure in the first direction, a second bit line disposed over the third drain/source structure in the first direction, and a charge storage layer coupled to at least a first sidewall of each of the first drain/source structure, the second drain/source structure, and the third drain/source structure.

Common-connection method in 3D memory

A method is provided, including following operations: activating a first word line to couple a first bit line with a second bit line to form a first conductive loop through a first transistor having a first terminal coupled to the first bit line and a second transistor having a first terminal coupled to the second bit line, wherein second terminals of the first and second transistors are coupled together; activating a second word line to couple a third bit line with a fourth bit line to form a second conductive loop, wherein the first and second word lines are disposed below the first to fourth bit lines; and identifying that the first conductive loop, the second conductive loop, or the combinations thereof is short-circuited or open-circuited.

Memory device and manufacturing method and test method of the same

A method of forming a memory cell includes: providing a semiconductor substrate; forming an active region on the semiconductor substrate; providing a first conductive line over a first portion of the active region to form a first transistor coupled to a bit line of the memory cell; providing a second conductive line over a second portion of the active region to form a second transistor coupled to the bit line of the memory cell; and providing a third conductive line over a third portion of the active region to form a third transistor coupled to a first word line of the memory cell. The first transistor and the second transistor are disposed on two sides of the third transistor, and the third transistor electrically couples the first transistor to the second transistor. A threshold voltage of the second transistor is different from a threshold voltage of the first transistor.

Memory cell and method of forming the memory cell

An OTP memory cell is provided. The OTP memory cell includes: an antifuse transistor, wherein a gate terminal of the antifuse transistor is connected to a first word line having a first signal, and the antifuse transistor is selectable between a first state and a second state in response to the first signal; and a selection transistor connected between the antifuse transistor and a bit line, wherein a gate terminal of the selection transistor is connected to a second word line having a second signal, and the selection transistor is configured to provide access to the antifuse transistor in response to the second signal. A first terminal of the antifuse transistor is a vacancy terminal, and a second terminal of the antifuse transistor is connected to the selection transistor.

One-time programmable memory device

A circuit is provided. The circuit includes a first die that includes a memory array, and the memory array includes a plurality of memory cells, a sensing element coupled to the plurality of memory cells, and a first plurality of conductive pads coupled to the sensing element. The circuit also includes a second die that includes an address decoder associated with the memory array of the first die and a second plurality of conductive pads coupled to the address decoder. The first die is coupled to the second die by an interposer. The address decoder of the second die is coupled to the sensing element of the first die. A first voltage swing of the first die is larger than a second voltage swing of the second die.

Memory circuits

A memory device, a semiconductor device and manufacturing methods for forming the memory device and the semiconductor device are provided. The memory device includes a stacking structure, a switching layer, channel layers and pairs of conductive pillars. The stacking structure includes alternately stacked isolation layers and word lines, and extends along a first direction. The stacking structure has a staircase portion and a connection portion at an edge region of the stacking structure. The connection portion extends along the staircase portion and located aside the staircase portion, and may not be shaped into a staircase structure. The switching layer covers a sidewall of the stacking structure. The channel layers cover a sidewall of the switching layer, and are laterally spaced apart from one another along the first direction. The pairs of conductive pillars stand on the substrate, and in lateral contact with the switching layer through the channel layers.

Three-dimensional memory device with word lines extending through sub-arrays, semiconductor device including the same and method for manufacturing the same

A semiconductor structure includes an isolation layer; first and second source/drain (S/D) metal electrodes over the isolation layer; a metal gate disposed laterally between the first and the second S/D metal electrodes; a ferroelectric layer on a bottom surface and sidewall surfaces of the metal gate; and an oxide semiconductor layer. The oxide semiconductor layer includes a first portion under the first and the second S/D metal electrodes; a second portion under the ferroelectric layer and being thicker than the first portion; third portions above the first and the second S/D metal electrodes, respectively; and fourth portions on sidewalls of the first and the second S/D metal electrodes, respectively, and connecting the third portions to the second portion.

Gate-last tri-gate FeFET

A memory device is provided, including a first bit cell including a first memory cell coupled to a first word line and a second bit cell including a second memory cell coupled to a second word line. The first and second memory cells are coupled to a first control line and further coupled to a first bit line through first and second nodes. The second bit cell further includes a first protection array coupled to the second memory cell at the second node coupled to the first bit line and further coupled to a third word line. When the first and second bit cells operate in different operational types, the first protection array is configured to generate an adjust voltage to the second node according to a voltage level of the third word line while the first bit cell is programmed.

Memory device and operating method of the same

A memory device includes first nanostructures stacked on top of one another; first gate stacks, where two adjacent ones of the first gate stacks wrap around a corresponding first nanostructure; second nanostructures stacked on top of one another; second gate stacks, where two adjacent ones of the second gate stacks wrap around a corresponding second nanostructure; a first drain/source feature electrically coupled to a first end of the first nanostructures; a second drain/source feature electrically coupled to both of a second end of the first nanostructures and a first end of the second nanostructures; and a third drain/source feature electrically coupled to a second end of the second nanostructures. At least one of the plurality of first gate stacks is in direct contact with at least one of the first drain/source feature or the second drain/source feature.

Memory devices and methods of manufacturing thereof

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HSINCHU COUNTY, Taiwan

Chia-en Huang