Globalfoundries Singapore Pte. Ltd.

Chia Ching Yeo

Kiok Boone Elgin Quek

Khee Yong Lim

Jae Han Cha

Donald Ray Disney

Yung Fu Chong

Elgin Kiok Boone Quek

Ying Keung Leung

Sai Hooi Yeong

Tao Wang

Shesh Mani Pandey

An image sensor pixel comprises a semiconductor substrate and a gate having a dielectric layer with a first section and a second section over the semiconductor substrate. The first section of the dielectric layer is thinner than the second section. A photodiode is disposed substantially beneath the gate. A gate well region is disposed beneath the gate and overlying the photodiode. A first doped semiconductor region separates the gate well region from a second doped semiconductor region. The second doped semiconductor region is in the semiconductor substrate and is adjacent to the gate.

Image sensor with reduced capacitance transfer gate

The present disclosure relates to semiconductor structures and, more particularly, to extended drain MOSFET structures with a dual oxide thickness and methods of manufacture. The structure includes an extended drain metal oxide semiconductor transistor (EDMOS) comprising a gate structure with a dual oxide scheme.

Extended drain MOSFETs (EDMOS)

The disclosure is related to MV transistors with reduced gate induced drain leakage (GIDL) and impact ionization. The reduced GILD and impact ionization are achieved without increasing device pitch of the MV transistor. A low voltage (LV) device region and a medium voltage (MV) device region are disposed on the substrate. Non-extended spacers are disposed on the sidewalls of the LV gate in the LV device region; extended L shaped spacers are disposed on the sidewalls of the MV gate in the MV device region. The non-extended spacers and extended L shape spacers are patterned simultaneously. Extended L shaped spacers displace the MV heavily doped (HD) regions a greater distance from at least one sidewall of the MV gate to reduce the GIDL and impact ionization of the MV transistor.

Transistor with source-drain silicide pullback

A method for fabricating an integrated circuit that include providing or obtaining an extremely thin silicon-on-insulator (ETSOI) substrate, dividing the ETSOI substrate into a low voltage field effect transistor (FET) region and one or both of a medium voltage FET region and a high voltage FET regions, and forming a low voltage FET within the low voltage FET regions and forming a medium and/or high voltage FET within the medium and/or high voltage FET region(s). Channel, source, and drain structures of the low voltage FET are formed in an upper silicon layer that is disposed above a buried oxide layer of the ETSOI substrate, whereas channel, source, and drain structures of the medium and/or high voltage FETs are formed at least partially below the upper silicon layer.

Methods for fabricating integrated circuits with low, medium, and/or high voltage transistors on an extremely thin silicon-on-insulator substrate

There is provided a method for fabricating a semiconductor device comprising the formation of a first device in the first device region, the first device comprising first diffusion regions. A stressor layer covering the substrate in the first device region and the first device is subsequently formed, the stressor layer having a first stress value. A laser anneal to memorize at least a portion of the first stress value in the first device is carried out followed by an activation anneal after the laser anneal to activate dopants in the first diffusion regions.

Growing community of inventors

Singapore, Singapore

Chia Ching Yeo