Taiwan Semiconductor Manufacturing Comp. Ltd.

Chia-Cheng Chen

Yee-Chia Yeo

Huicheng Chang

Liang-Yin Chen

Chih-Kai Yang

A method of correcting a misalignment of a wafer on a wafer holder and an apparatus for performing the same are disclosed. In an embodiment, a semiconductor alignment apparatus includes a wafer stage; a wafer holder over the wafer stage; a first position detector configured to detect an alignment of a wafer over the wafer holder in a first direction; a second position detector configured to detect an alignment of the wafer over the wafer holder in a second direction; and a rotational detector configured to detect a rotational alignment of the wafer over the wafer holder.

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Chu, Taiwan

Chia-Cheng Chen