Jusung Engineering Co., Ltd.

Chi Wook Yu

Hyung Sup Lee

Sung Hui Lee

Sang Don Lee

An electro-optic device and a method for manufacturing the same. The method includes forming a bottom electrode on a substrate, forming a first insulation film crossing over the bottom electrode, forming an organic film on the substrate, forming a top electrode film on the organic film, and forming a top electrode that crosses the bottom electrode by laser-scribing the top electrode film. Herein, forming the top electrode by laser-scribing may position a bottom edge of the top electrode along an upper side of the first insulation film. Therefore, processing required for separately forming the top electrodes may be reduced, thereby simplifying manufacturing processes and saving manufacturing cost. Furthermore, since the insulation film is formed under the top electrode edge, leakage current and device malfunction caused by deformation of the top electrode can be prevented, even though the top electrode edge is damaged during laser-scribing. Thus, electro-optic device reliability can be improved.

Electro-optic device and method for manufacturing the same

Disclosed are a substrate alignment apparatus precisely and automatically aligning a mask on a substrate by sequentially moving the substrate and the mask horizontally on a susceptor being driven up and down, a substrate processing apparatus including the same, and a substrate alignment method. The substrate alignment apparatus includes a position fixing unit protruding from an upper surface of the susceptor driven up and down in a chamber so as to form a reference line for alignment of the substrate and the mask, a horizontal transfer unit connected at outer surfaces of two sidewalls of the chamber and extended into the chamber to align the substrate and the mask according to the up and down movement of the susceptor until the substrate and the mask are stopped by the position fixing unit from horizontally moving, and a control unit adapted to control the susceptor and the horizontal transfer unit.

Apparatus for substrate alignment, apparatus for substrate processing having the same, and substrate alignment method

Provided are an electro-optic device and a method for manufacturing the same. The method includes forming a bottom electrode on a substrate, forming a first insulation film to cross over the bottom electrode forming an organic film on the substrate where the bottom electrode and the first insulation film are formed, forming a top electrode film on the organic film, and forming a top electrode to cross the bottom electrode by removing a portion of the top electrode film through a laser-scribing process. Herein, in the forming of the top electrode through the laser-scribing process, an edge region of a bottom surface of the top electrode may be positioned corresponding to an upper side of the first insulation film. Therefore, it is possible to reduce the number of processing apparatuses and steps required for separately forming the plurality of top electrodes, thereby simplifying manufacturing processes and saving manufacturing cost. Furthermore, since an insulation film is formed under an edge region of a top electrode, it is possible to prevent the generation of leakage current and the malfunction of a device caused by the deformation of the top electrode even though the edge region of the top electrode is damaged during a laser-scribing process. Thus, the reliability of electro-optic devices can be improved.

Growing community of inventors

Yongin-si, South Korea

Chi Wook Yu