Mosel Vitelic Corporation

Chi-Shu Huang

Chia-Lin Yeh

Jia-Rurng Hwu

Ming-Yeng Wang

A sleeve means is described. The sleeve means comprises a round plane and ring-shaped side adjacent to the round plane. The round plane has a central hole and six periphery holes thereon. The central hole and six peripheral holes respectively correspond to a central opening and six screw holes of a heater adapter flange used in Gasonics L3510 (trademark) etcher. The sleeve means could be jacketed onto the heater adapter flange for dispersing the stress on and reducing deformation of the heater adapter flange when the heater adapter flange is mounted on the chamber of the etcher.

Sleeve for an adapter flange of the gasonics L3510 etcher

The present invention discloses a piping system for etch equipment including an exhaust gas tube connected with an etching chamber for conveying exhaust gas out of the chamber. A cooling gas tube connected to the etching chamber allows cooling gas to flow around a back side of the wafer placed in the chamber for cooling the wafer's temperature. A cooling gas bypass tube connected between the cooling gas tube and the exhaust gas tube is used for regulating a gas flow in the cooling gas tube. Moreover, a plurality of heaters are set out of conjunctions of the cooling gas tube and cooling gas bypass tube with the exhaust gas tube so as to retard particle accumulation in the conjunctions of these tubes.

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Chungli, Taiwan

Chi-Shu Huang