Taiwan Semiconductor Manufacturing Comp. Ltd.

Powertech Technology Inc.

Chi-Sheng Chang

Clement Hsingjen Wann

Jeff J Xu

Chin-Ta Wu

Cheng-Hao Ciou

Chi Chieh Yeh

I-Lin Chan

Chi Cheh Yeh

A wafer storage device includes a wafer cassette and a carrier plate. The wafer cassette includes a housing and a plurality pairs of retaining members disposed on lateral walls of the housing. The carrier plate is placed into the housing, is supported by one pair of the retaining members, and includes a plate body carrying the wafer thereon, and having a periphery formed with two slots extending respectively in two different radial directions of the wafer. Two positioning members respectively and radially correspond in position to the slots, and abut against an outer rim of the wafer.

Wafer storage device, carrier plate and wafer cassette

A CMOS FinFET semiconductor device provides an NMOS FinFET device that includes a compressive stress metal gate layer over semiconductor fins and a PMOS FinFET device that includes a tensile stress metal gate layer over semiconductor fins. A process for forming the same includes a selective annealing process that selectively converts a compressive metal gate film formed over the PMOS device to the tensile stress metal gate film.

Metal gate stress film for mobility enhancement in FinFET device

Growing community of inventors

Hsinchu, Taiwan

Chi-Sheng Chang