Kaohsiung Medical University

Taiwan Semiconductor Manufacturing Comp. Ltd.

Chi-Jen Shih

Pei-Shan Lu

Jung-Chang Kung

Hao-Che Hsieh

Chih-Wei Hung

The present disclosure discloses a ceramic material having a positive slow release effect and a method for manufacturing the same. The ceramic material comprises a hierarchically meso-macroporous structure which composition at least includes silicon and oxygen, wherein the hierarchically meso-macroporous structure includes a plurality of macropores and a wall having a plurality of arranged mesopores, and the plurality of macropores are separated by the wall; and nano-scale metal particles confined in at least one of the plurality of arranged mesopores. The nano-scale metal particles have a positive slow release effect from the at least one of the plurality of arranged mesopores. The ceramic material has a property of inhibiting growth of microorganisms or killing the microorganisms in an environment or a system containing a hydrophilic medium.

Ceramic material having a positive slow release effect, method for manufacturing the same, and system comprising the same

A method for fabricating the floating gate of a split-gate flash memory. A patterned sacrificial layer is formed over a substrate. A doped polysilicon layer and an insulation layer are formed in sequence over the sacrificial layer. The doped polysilicon layer and the insulation layer above the sacrificial layer are removed by chemical-mechanical polishing. The exposed doped polysilicon layer is removed. Finally, the sacrificial layer is removed to complete the fabrication of the floating gate.

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Kaohsiung, Taiwan

Chi-Jen Shih