United Microelectronics Corp.

Chi-Ching Huang

Chung-An Chen

Ju-Te Chen

Wen-Tsung Wu

Shih-Ming Yen

A prediction model for exposure dose is indicated by the following formula, E=E+E, wherein E represents an optimized exposure dose, Erepresents a preset exposure dose of a process control system, and Erepresents an exposure dose compensation value, and=[()/()]&#xd7;(')&#xd7;(),wherein MTTrepresents the differences between the MTT value of a previous lot and the MTT value of a next lot, CDrepresents the actual critical dimension of the mask, X represents the magnification of the mask, Erepresents the actual exposure dose of a previous lot, A&#x2032; represents an experimental value obtained from the results of different lots, Wrepresents the last batch of weights and Wrepresents an average weight, and CD, E, A&#x2032;, Wand Ware set parameters built into the process control system.

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Tainan County, Taiwan

Chi-Ching Huang