Macronix International Co., Ltd.

Chi-Chen Luo

Wei-Chen Chen

Hsin-Cheng Liu

Andy Lin

Shih-Hao Shih

A gas conduit for a load lock chamber. The gas conduit connects to a gas source to introduce gas from the gas source into the load lock chamber of semiconductor equipment. The structure includes a filter mounted on the top surface of the load lock chamber, a pressure limitative device to maintain a preset pressure of gas source, and a gas inlet device including an inlet end connected to the pressure limitative device and an outlet end connected to the filter, wherein the gas inlet device introduces gas from the gas source into the load lock chamber with its maximum flow rate when breaching the vacuum therein.

Growing community of inventors

Hsinchu, Taiwan

Chi-Chen Luo