Entegris, Inc.

Millipore Corporation

Millipore Investment Holdings, Ltd.

Chester L Bejtlich

Patrick Doering

Christopher J Vroman

Gastón De Los Reyes

Chintan Patel

David Trio

Matthew B Nicolas

Wisam Yacteen

Bradley H Wood

Turgut Sarioglu

Christopher Vroman

A method of packaging a CMP brush having a cylindrical brush portion and a pair of end connection portions. The method includes saturating the brush with a liquid; covering the cylindrical brush portion with a flexible sheet that extends around and engages the surface of the cylindrical portion; engaging each of the end connection portions with a respective end support; inserting the dampened brush into a rigid polymer tubular shipping container and supporting the end connection portions within the polymer tube; and providing an additional exterior self-supporting packaging.

CMP brush packaging

Cleaning sponge roller

An electrodeionization device for large-volume ultra-pure deionization of water is disclosed. The device comprises a plurality of alternating ion depletion and concentration compartments, interposed between an anode assembly and a cathode assembly, through which flows either a product stream or a waste stream. Each compartment contains several fluid-accessible channels packed with an appropriate ion-exchange medium. The flow of the waste and product streams among the compartments is 'parallel' (i.e., contemporaneous). The flow of a stream through the compartments&#x2014;i.e., through the channels therein&#x2014;is 'serial' (i.e., sequential). In an embodiment, electrical current is generated through the compartments using segmented electrodes&#x2014;either in the anode and/or the cathode assembly&#x2014;that are connected to a single multiple-outlet power source. The device is fast, efficient, robust, and its configuration is comparatively easy to scale upwards to accommodate larger water processing volumes.

Electrodeionization device

A rapid, highly sensitive determination, in-situ, of the integrity and/or pore size distribution of a porous membrane structure (e.g. a pleated membrane filter cartridge) is disclosed. The identification of the integrity and/or pore size characteristics involves interpreting the residence time distribution (RTD) of the membrane structure under test and includes using a tracer gas in mixture with a carrier gas as part of a diffusion or bubble-point test. The tracer gas mixture exiting the downstream surface of the membrane becomes moisturized and is excited with a pulsed (or otherwise modulated) light source at a wavelength corresponding to the absorption line of the tracer gas. The frequency of modulation is chosen such that the tracer gas preferentially generates a photo-acoustic emission while the emission due to the absorption of water present is suppressed. The detected pressure pulse is processed to produce electrical signals indicative of the concentration of tracer gas that passes through the membrane. A non-integral (or incorrect pore size) device will demonstrate a characteristic RTD that differs from an integral (or correct pore size) device in either/or (or both) the onset time prior to tracer gas detection and the rate of change of tracer gas concentration with time.

Integrity test for porous structures using acoustic emission

Growing community of inventors

Reading, MA, United States of America

Chester L Bejtlich