Sony Corporation

Cheow Tong Cheng

Akio Takada

Shun Kayama

Ching Biing Yeo

A MEMS (micro-electromechanical system) device having a rotor, a statorand a shaftconnected to the statorand around which the rotorrotates. Groovesare formed in a portion of the rotor, such that when the rotorrotates an air bearing is formed for supporting the rotorand maintaining its distance from the shaftand stator. The rotoris formed from joining two substrates. One of the substratesincludes a surface having openingsincluding frustoconical walls, and one of the substratesincludes a surface having openingsincluding walls perpendicular to the surface of the substrate. The openings in the two substrates are in register with each other so that pairs of the openings form chambers. Each chamberis provided with a shaft, which is positioned with a wide section of the shaft trapped in the chamber. The wide section of the shaft has a frustoconical surface facing the frustoconical walls of the chamber

Growing community of inventors

Singapore, Singapore

Cheow Tong Cheng