Applied Materials, Inc.

Morgan Advanced Ceramics Limited

Chengtsin Lee

Jennifer Y Sun

Yikai Chen

David Fenwick

Gary D Harland

Edward Tomasek

Samuel H Ahrendes

George York

An article has a body having a protective coating. The protective coating is a thin film that includes a metal oxy-fluoride. The metal oxy-fluoride has an empirical formula of MOF, where M is a metal, y has a value of 0.1 to 1.9 times a value of x and z has a value of 0.1 to 3.9 times the value of x. The protective coating has a thickness of 1 to 30 microns and a porosity of less than 0.1%.

Protective metal oxy-fluoride coatings

A layer arrangement for an electrostatic chuck comprises a first ceramic layer; a second ceramic layer; a metallised layered disposed between the first and second ceramic layers. The first ceramic layer comprises at least 90.0 wt % alumina, titania, ZrO, YO, AlN, SiN, SiC, transition metal oxides or combinations thereof; and in the range of 0.1 to 10.0 wt % tantalum oxide (TaO).

High density corrosion resistant layer arrangement for electrostatic chucks

A method of forming one or more high temperature co-fired ceramic articles, comprising the steps of:&#x2014;

Method for manufacturing large ceramic co-fired articles

An article comprises a body having a protective coating. The protective coating is a thin film that comprises a metal oxy-fluoride. The metal oxy-fluoride has an empirical formula of MOF, where M is a metal, y has a value of 0.1 to 1.9 times a value of x and z has a value of 0.1 to 3.9 times the value of x. The protective coating has a thickness of 1 to 30 microns and a porosity of less than 0.1%.

Articles may be protected against halide plasma, by applying a rare earth-containing glaze to the surface of the article. The glaze may be a coating comprising; 20 to 90 mol % SiO, 0 to 60 mol % AlO, 10 to 80 mol % rare earth oxides and/or rare earth fluorides (REX), wherein SiO+AlO+REX&#x2265;60 mol %.

Yttrium aluminum silicate glass ceramic coating for semiconductor chamber apparatus

An article comprises a body having a coating. The coating comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride. The coating includes a glaze on a surface of the coating, the glaze comprising the eutectic system having the super-lattice of the first fluoride and the second fluoride.

Low temperature fluoride glasses and glazes

An article comprises a body and at least one final plasma resistant coating layer on at least one surface of the body. The at least one final plasma resistant coating layer is a mixture of a ScFand an initial plasma resistant coating material selected from the group consisting of YF, YO, a compound of YAlO, a solid-solution of YO&#x2014;ZrO, CaF, MgF, SrF, AlF, ErF, LaF, NdF, ScF, CeF, ZrF, and combinations thereof. The at least one final plasma resistant coating layer has a thermal expansion coefficient that is within about 20% of the thermal expansion coefficient of the body.

Plasma resistant coating with tailorable coefficient of thermal expansion

A method includes immersing an article comprising a yttrium based oxide in an acidic cleaning solution comprising water and 1-10 mol % HF acid. A portion of the yttrium based oxide is dissolved by the HF acid. A yttrium based oxy-fluoride is formed based on a reaction between the HF acid and the dissolved portion of the yttrium based. The yttrium based oxy-fluoride is precipitated onto the article over the yttrium based oxide to form a yttrium based oxy-fluoride coating. The acidic cleaning solution may include a yttrium based salt, which may additionally react with the HF acid to form more of the yttrium based oxy-fluoride.

Cleaning process that precipitates yttrium oxy-flouride

An article comprises a body having a coating. The coating comprising a mixture of a first oxide and a second oxide. The coating includes a glaze on a surface of the coating, the glaze comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride.

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Union City, CA, United States of America

Chengtsin Lee