Taiwan Semiconductor Manufacturing Comp. Ltd.

Tsinghua University

Cheng-Kuang Chen

Chi-Hung Liao

Wei Chang Cheng

Ta-Jen Yen

Yueh-Chun Lai

Yue-Jun Lai

Embodiments of the present disclosure relate to apparatus and methods for cleaning an exhaust path of a semiconductor process tool. One embodiment provides an exhaust pipe section and a pipe cleaning assembly connected between a semiconductor process tool and a factory exhaust. The pipe cleaning assembly includes a residue remover disposed in the exhaust pipe section. The residue remover is operable to move in the exhaust pipe section to dislodge accumulated materials from an inner surface of the exhaust pipe section.

Apparatus and methods for exhaust cleaning

The present invention is related to an imaging metamaterial, comprising at least one resonant unit with a controllable split structure that comprises at least one gap and at least one segment, wherein the segment is connected by a node or separated by the gap. The present invention also provides a method for preparing an imaging metamaterial. The present invention further provides an imaging apparatus.

Imaging metamaterial for projecting an object image with molecular and refractive index signal

A dielectric resonator for a negative refractivity medium, which is coupled to a plurality of substrates, comprises at least one crystal unit, at least one first crystal cube and at least one second crystal cube. The crystal units are arrayed on the substrate. On an identical substrate, each crystal unit has a first spacing with respect to one adjacent crystal unit and a second spacing with respect to another adjacent crystal unit. The first spacing is vertical to the second spacing. Each crystal unit has one first crystal cube and one second crystal cube. A third spacing exists between the first and second crystal cubes. The first and second crystal cubes have a permittivity greater than 20. The present invention adopts the negative refractivity medium to achieve lower dielectric loss. Further, the present invention features isotropy and has low fabrication cost and high industrial utility.

Growing community of inventors

Taichung, Taiwan

Cheng-Kuang Chen