United Microelectronics Corp.

Cheng-Jung Hsu

Kun-Lin Wu

Meng-Jin Tsai

Cheng-Han Huang

Po-Hung Chen

A method is provided for forming separated spacer structures in a mixed-mode integrated circuit, which can be used to form spacer structures with different widths for the various kinds of devices in the mixed-mode integrated circuit. The method is for use on a semiconductor substrate which is formed with at least a first gate for a first kind of device of the mixed-mode integrated circuit and a second gate for a second kind of device of the integrated circuit, with the second gate being larger in width than the first gate such that the first gate is formed with a first spacer structure on the sidewalls thereof to a first desired width while the second gate is formed with a second spacer structure on the sidewalls thereof to a second desired width larger than the first desired width. The method features a two-step etching process in which the first etching process is performed to form one spacer structure to the first desired width, while the second etching process is performed to form the other spacer structure to the second desired width.

Method of forming separated spacer structures in mixed-mode integrated circuits

A method of fabricating shallow trench isolation. A silicon oxide layer is formed on a substrate. The silicon oxide layer is patterned and a portion of the substrate is removed to form a trench within the substrate. A liner oxide layer is formed on the sidewall of the trench. An insulating layer is formed on the substrate and filled in the trench. A portion of the insulating layer is removed by CMP to expose the silicon oxide layer. The silicon oxide layer is removed and the STI structure is completed.

Growing community of inventors

Hsinchu, Taiwan

Cheng-Jung Hsu