Industrial Technology Research Institute

Cheng-Jien Peng

Ming-Jye Tsai

Ching-Yi Wu

Ruei-Hung Jang

Yue-Min Wan

Raey-Shing Huang

Chun-Hsu Ke

Ching-Jui Ting

A flow controller module comprising at least one micro flow sensor and a microvalve, integrated in a micro flow channel, is disclosed. The micro flow sensor comprises a pressure sensitive flow sensor. At the position of the micro flow sensor, the micro flow channel is provided with an orifice so that pressure of a flow may be enlarged to facilitate measurement of the flow speed. The microvalve comprises a silicon microbridge with a mesa structure and is driven by a voltage. The microvalve may operate under a normally closed mode or a normally open mode. Disclosed in this invention is also a flow sensor suited in the integrated flow controller module. Methods for preparing the flow sensor and the flow controller module are also disclosed.

Integrated flow controller module

An electric resistance heating element for heating fluids includes a plurality of ring-shaped members made of a ceramic material having a positive temperature coefficient (PTC) disposed in concentric generally coplanar relationship, one around the other, and spaced apart from each other to form through passages for fluid flow therebetween. Electrode layers are formed at the two opposite ends of each ring and a pair of electrically conductive securing ring members are each securely soldered to a respective one of the electrode layers. Each securing ring member is integrally formed with two diametrical cross members soldered to each ceramic ring-shaped members and with each cross member having spaced grooves radially engaging and positioning the ring-shaped ceramic members. The outer periphery of each securing ring member incorporates a plurality of radially extending lugs for mounting the heating element for use and for making electrical connection between the securing ring member and a power supply.

Positive temperature coefficient ceramic heating element for heating a

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Hsinchu, Taiwan

Cheng-Jien Peng