Rolls-royce Corporation

Chartered Semiconductor Manufacturing Ltd (corporation)

Rolls-royce Deutschland Ltd & Co. Kg

Cheng Cheh Tan

Lap Chan

Alex See

Randall Cher Liang Cha

Goetz G Feldmann

Thomas Haubold

Harsh Gupta

Chow Cher Wong

Paul Barrowman

A method and apparatus for vibro-treating an object. The method includes the steps of controlling a relative displacement between a vibro-treating media and a surface area of the object to provide a vibro-treating effect; and, controlling movement of the object relative to a surface of the vibro-treating media while controlling relative displacement between the vibro-treating media and the surface area of the object, according to one or more pre-determined conditions, to provide a substantially even vibro-treating condition over the surface area of the object.

Methods of vibro-treating and vibro-treating apparatus

A gate structure having associated (LDD) regions and source and drain is formed as is conventional. A first oxide spacer, for example, is formed along the sidewalls of the gate structure. A layer of metal such as titanium is then deposited over the surface of the gate structure. Second sidewall spacers are formed covering the metal over the first sidewall spacer and covering the metal over isolation regions. A layer of polysilicon is deposited over the surface of the gate structure. A rapid thermal annealing (RTA) is performed causing the metal to react with both the silicon in the junction below the metal and the polysilicon above the metal forming a metal silicide. Metal along the sidewalls between the first and second sidewall spacers and over the isolation regions does not react and is etched away. By providing an additional source of silicon in the polysilicon layer above the metal, a thicker silicide is achieved.

Technique to achieve thick silicide film for ultra-shallow junctions

Growing community of inventors

Singapore, Singapore

Cheng Cheh Tan