Taiwan Semiconductor Manufacturing Comp. Ltd.

Cheng-Chao Lin

Ying-Lang Wang

Miao-Cheng Liao

Kuo-Hsien Cheng

Shao-Ta Hsu

Tung-Gan Cheng

Hsueh-Cheng Lin

Chia-Fu Tsai

Yaw-Wen Wu

Tung-Liang Wua

Chih-Jung Yeh

Ray-Wen Tsai

Hung-Tse Huang

An MIM structure and method for forming the same the method including forming a bottom conductive electrode overlying a semiconducting substrate; forming a first protection layer on the conductive electrode; forming a dielectric layer on the first protection layer; and, forming an upper conductive electrode on the dielectric layer to form a metal-insulator-metal (MIM) structure.

MIM structure and fabrication process with improved capacitance reliability

An apparatus and method for adjusting the position of a load port utilized in a semiconductor wafer processing system. Generally, a door opener can be configured for opening a door through which a semiconductor wafer may enter for subsequent positioning and processing thereof by a semiconductor wafer processing system. A load port is associated with the door opener. A calibration mechanism can then be utilized for calibrating the load port for leveling and height positioning, such that a plurality of directional axis associated with the load port do not interfere with one another, thereby conserving calibration time while permitting a single individual to perform calibration operations thereof.

Precise mechanism for load port adjustment

Growing community of inventors

Chia-Yi, Taiwan

Cheng-Chao Lin