Taiwan Semiconductor Manufacturing Comp. Ltd.

Cheng-Chang Chang

Li-Ren Lin

Chien-Jung Huang

Shi-Ming Wang

A method for aligning a loadport of a process machine to an overhead hoist transport (OHT) system which can be carried out by first providing an OHT rail overhanging a cleanroom floor; setting a reference point in the cleanroom in proximity to the OHT rail; marking on the cleanroom floor boundary reference lines for each row of process machines based on the reference point; positioning a process machine on the cleanroom floor with a boundary line of the machine aligned to the boundary reference line; mounting a loadport onto the process machine; and fine tuning a center line of the loadport to a reference line on the floor that is 200 mm apart from and parallel to the boundary reference line.

Method for aligning a loadport to an overhead hoist transport system

A pod transfer system having a retractable mast and a rotatable and vertically movable hoist is disclosed. A first extendable robot is situated under a first overhead transfer (OHT) unit, and a second extendable robot is situated under the second OHT unit. Each extendable robot has a fully retracted position for loading a pod from its respective OHT unit, as well as a fully extended position. The retractable mast is situated between a first conveyer and a second conveyer that are themselves situated between the OHT units. The retractable mast has a default fully extended position and a tool move-in fully retracted position. The hoist is situated on the retractable mast. The hoist is able to load the pod from either robot when the robot is in its fully extended position, and is able to load the pod to one of the conveyors.

Pod transfer system having retractable mast and rotatable and vertically movable hoist

A safety system for an overhead transport (OHT) vehicle. In one embodiment, the safety system may include a pair of safety panels provided on opposite sides of the load and unload ports on a tool or stocker. An overhead sensor is provided on the OHT and is operably connected to a light curtain on the tool. In the event that the overhead sensor detects an obstruction in the travel path of the OHT during loading of a pod or cassette into the tool or stocker, the light curtain transmits an emergency stop signal to the tool or stocker controller, which terminates further loading operation of the OHT. In another embodiment, the light curtain assumes the look-down sensing function of the overhead sensor in the event that tool components interfere with the look-down function of the overhead sensor.

Safety system for overhead transport vehicle

An interbay transfer interface between an automated material handling system and a stocker which includes a conveyor belt positioned juxtaposed to the stocker, a plurality of open-top containers positioned on the conveyor belt, at least two locating pins situated on the conveyor belt for engaging the containers, a wave emitting/receiving device positioned immediately adjacent to the conveyor belt, and a controller for receiving signals from the wave emitting/receiving device and sensors mounted on the locating pins.

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Tao-Yuan, Taiwan

Cheng-Chang Chang