Taiwan Semiconductor Manufacturing Comp. Ltd.

Chen-Yu Hu

Chien-Min Lee

Shy-Jay Lin

Mingyuan Song

Yen-Lin Huang

Yu-Fang Chiu

Chia-Chin Tsai

Chi-Feng Pai

Cheng-Wei Peng

Chao-Chung Huang

Kuan-Hao Chen

A memory device and a manufacturing method thereof are provided. The memory device includes a magnetic tunneling junction (MTJ) and a spin Hall electrode (SHE). The MTJ includes a free layer, a reference layer and a barrier layer lying between the free layer and the reference layer. The SHE is in contact with the MTJ, and configured to convert a charge current to a spin current for programming the MTJ. The SHE is formed of an alloy comprising at least one heavy metal element and at least one light transition metal element. The heavy metal element is selected from metal elements with one or more valence electrons filling in 5d orbitals, and the light transition metal element is selected from transition metal elements with one or more valence electrons partially filling in 3d orbitals.

Memory device and manufacturing method thereof

Growing community of inventors

Taipei, Taiwan

Chen-Yu Hu