Taiwan Semiconductor Manufacturing Comp. Ltd.

Other

Chen Yu Chen

Ming Chyi Liu

Jhih-Bin Chen

Eugene Chen

Some embodiments relate to a method for forming a vertical cavity surface emitting laser (VCSEL) structure. The method includes forming an optically active layer over a lower reflective layer and forming an upper reflector over the optically active layer. A first spacer is formed along sidewalls of the upper reflector. An oxidation process is performed with the first spacer in place to oxidize a peripheral region of the optically active layer. A first etch process is performed on the lower reflective layer and the oxidized peripheral region, thereby forming a lower reflector and an optically active region.

Techniques for vertical cavity surface emitting laser oxidation

Some embodiments relate to a vertical cavity surface emitting laser (VCSEL) device including a VCSEL structure overlying a substrate. The VCSEL structure includes a first reflector, a second reflector, and an optically active region disposed between the first and second reflectors. A first spacer laterally encloses the second reflector. The first spacer comprises a first plurality of protrusions disposed along a sidewall of the second reflector.

In some embodiments, the present disclosure relates to a method of forming a package assembly. A wet etch stop layer is formed over a frontside of a semiconductor substrate. A sacrificial semiconductor layer is formed over the wet etch stop layer, and a dry etch stop layer is formed over the sacrificial semiconductor layer. A stack of semiconductor device layers may be formed over the dry etch stop layer. A bonding process is performed to bond the stack of semiconductor device layers to a frontside of an integrated circuit die, wherein the frontside of the semiconductor substrate faces the frontside of the integrated circuit die. A wet etching process is performed to remove the semiconductor substrate, and a dry etching process is performed to remove the wet etch stop layer and the sacrificial semiconductor layer.

Double etch stop layer to protect semiconductor device layers from wet chemical etch

Some embodiments relate to a method for manufacturing a vertical cavity surface emitting laser. The method includes forming an optically active layer over a first reflective layer and forming a second reflective layer over the optically active layer. Forming a masking layer over the second reflective layer, where the masking layer leaves a sacrificial portion of the second reflective layer exposed. A first etch is performed to remove the sacrificial portion of the second reflective layer, defining a second reflector. Forming a first spacer covering outer sidewalls of the second reflector and masking layer. Performing an oxidation process to oxidize a peripheral region of the optically active layer. A second etch is performed to remove a portion of the oxidized peripheral region, defining an optically active region. Forming a second spacer covering outer sidewalls of the first spacer, the optically active region, and the first reflector.

An improved connecting mechanism for a bulb holder and a socket includes a latch member which is one part of the bulb holder and a securing seat which is one part of the socket. The latch member includes a boss which extends horizontally from the outer wall of the flange of the tubular body of the bulb holder. A hooking rod extends from the underside of the boss to a preset length. A slightly enlarged bead is provided at the end of the hooking rod. The securing seat includes a projected portion extended from the top of the outer wall of the tubular body of the socket. The projected portion further includes a securing channel for receiving the hooking rod. The inner diameter of the securing channel is slightly smaller than the hooking rod in such a manner that an interference fit is reached therebetween.

Growing community of inventors

Hsinchu, Taiwan

Chen Yu Chen