Massachusetts Institute of Technology

Nano Analytik Gmbh

Synsfuels Americas Corporation

Chen Yang

Kamal Youcef-Toumi

Ivo Rangelow

Christoph Reuter

Mathias Holz

Tzvetan Ivanov

Yi Wang

Fangzhou Xia

Active cantilever probes having a thin coating incorporated into their design are disclosed. The probes can be operated in opaque and/or chemically harsh environments without the need of a light source or optical system and without being significantly negatively impacted by corrosion. The probes include a substrate that has a cantilever, a thermomechanical actuator associated with the cantilever, a piezoresistive stress sensor disposed on the cantilever, and a thin coating disposed on the cantilever and the piezoresistive stress sensor. The coating is bonded to the substrate, is thermally conductive, and has a low thermal resistance. Further, the thin coating is configured to have little to no impact on one or more of a mass of the active probe, a residual stress of the cantilever, or a stiffness of the active probe. Techniques for performing topography and making other measurements in an opaque and/or chemically harsh environment are also provided.

Coated active cantilever probes for use in topography imaging in opaque liquid environments, and methods of performing topography imaging

Growing community of inventors

Cambridge, MA, United States of America

Chen Yang