Gigaphoton Inc.

The University of Tokyo

Chen Qu

Atsushi Fuchimukai

Yohei Kobayashi

Hironori Igarashi

Zhigang Zhao

Yohei Tanaka

A wavelength conversion apparatus according to an aspect of the present disclosure is a wavelength conversion apparatus that performs wavelength conversion of light through a non-linear crystal and including a first non-linear crystal, a container in which the first non-linear crystal is housed, a crystal holding member provided inside the container for fixing the first non-linear crystal, a first window provided to the container for guiding light to the first non-linear crystal from outside of the container, a second window provided to the container for guiding light output from the first non-linear crystal to outside of the container, a first heater provided inside the container for heating the first non-linear crystal, a battery that supplies electric power to the first heater, and a first controller that controls electric power supply to the first heater.

Wavelength conversion apparatus, solid-state laser system, and electronic device manufacturing method

In a laser system according to an aspect of the present disclosure, the following components are disposed: a first container that accommodates a first heater and a first crystal holder holding a first nonlinear crystal and includes a first light incident window via which laser light is incident and a first light exit window via which the laser light exits; a second container that accommodates a second heater and a second crystal holder holding a second nonlinear crystal and includes a second light incident window via which the laser light is incident and a second light exit window via which the laser light exits; and a stage that holds the first and second containers. A controller controls the stage to move the first nonlinear crystal away from the optical path of the laser light and inserts the second nonlinear crystal into the optical path of the laser light.

Laser system and method for manufacturing electronic devices

A wavelength conversion system including: A. a first nonlinear optical crystal to which first pulsed laser light having a first polarization state and a first wavelength and second pulsed laser light having a second polarization state and a second wavelength are inputted and which is configured to output in response to the input the second pulsed laser light and first sum frequency light having the second polarization state and a third wavelength produced by sum frequency mixing of the first wavelength with the second wavelength; and B. a second nonlinear optical crystal to which the first sum frequency light and the second pulsed laser light outputted from the first nonlinear optical crystal are inputted and which is configured to output in response to the input third pulsed laser light having a fourth wavelength.

Growing community of inventors

Oyama, Japan

Chen Qu