Gudeng Precision Industrial Co., Ltd.

Chen-Hao Chang

Jui-Ken Kao

Ming-Chien Chiu

Chih-Ming Lin

Chin-Ming Lin

A wafer container is provided. The wafer container includes a housing, a door and an air-tight device. The housing has a room with an opening formed therein, and a door frame surrounding the opening. The door fits in the door frame to close the opening. The air-tight device is disposed around the door, located between the door and the door frame, and having a protruding part extending toward the room. The protruding part has an early-stage pressure-adjusting element configured to exhaust a first gas from the room by pumping a second gas into the room when the door is closed.

Wafer container with air-tight device

The present invention relates to gas distributors used in wafer carriers. The gas distributors comprise a body having an interior space, a separator configured at the front side of the body in the interior space, and an air inlet connected with the body. One edge of the separator and the front side of the body together form a passage. The configuration of the passage in the gas distributors enables the gas distributors to evenly distribute gases.

Growing community of inventors

Taipei, Taiwan

Chen-Hao Chang