Taiwan Semiconductor Manufacturing Comp. Ltd.

Chen-Chin Chen

Yue Tsang Hsu

Ban-Yaw Lee

Kun-Chih Huang

Reuy-Huang Huang

Chin-Hui Hung

Kuei-Lung Chou

A Standard Mechanical Inter Face is described where a sensor causes a fan in a fan filter unit, attached to a Standard Mechanical Inter Face, to be turned on or off depending on the position of the door in semiconductor wafer equipment. An apparatus for realizing this and a method for its use are given. Two examples of sensors for realizing this invention are described. A preferred embodiment of the invention is the use of an infrared sensor placed within the Standard Mechanical Inter Face and containing an infrared transmitter and infrared receiver in one housing.

Use of a sensor to control the fan filter unit of a standard mechanical

A transportable apparatus, or a pod carrier, is disclosed in conjunction with a standardized mechanical interface system (SMIF) whereby the tracking of transported articles is made easier and more reliable. This is accomplished by affixing a card-holder to the pod carrier. The card-holder can hold the process run-cards snugly, or otherwise, at all times in such a way that the cards are visible and amenable to expeditious processing. It is shown that by extending the function of a pod carrier to a tracking device as well, the probability of lost run-cards and the concomitant lost time in the manufacturing line, and/or missteps in the processing of parts are reduced.

Pod carrier function expansion by adding a fixture

This method provides for increasing integrated circuit production of a fabrication facility comprising collecting data from a plurality of machines, calculating of the present Ratio of Running Work (RRW), comparing present RRW to optimum RRW, checking the system to determine which machines are idle, and taking steps to increase the number of running machines. Steps taken to decrease the number of idle machines include dispatching commands to a computerized dispatching system or operators. The steps of the process are repeated to further increase RRW.

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Miao-Li, Taiwan

Chen-Chin Chen