Shandong Normal University

Chen Chen

Feng Chen

Zhanghua Han

Shengkun Yao

Junlong Zhang

A method for fabricating a nonlinear optical waveguide with gradient refractive index distribution, in which a nonlinear optical crystal is prepared; a type of first heavy ions, a type of second heavy ions and parameters related to an irradiation process are determined; the first heavy ions are accelerated to generate a first ion beam; the nonlinear optical crystal is bombarded with the first ion beam to obtain a primary processed crystal; the second heavy ions are accelerated to generate a second ion beam; the primary processed crystal is bombarded with the second ion beam to obtain a secondary processed crystal; and the secondary processed crystal is segmented to obtain the desired optical waveguide.

Method for fabricating nonlinear optical waveguide with gradient refractive index distribution

A method for building an etching-free hybrid nonlinear waveguide composed of a polymer and an ion-implanted nonlinear crystal is provided. A nonlinear crystal is pretreated, and subjected to ion implantation to obtain an ion-implanted nonlinear crystal. The ion-implanted nonlinear crystal is spin-coated with a photoresist, and subjected to electron beam exposure, heating, and developing, so as to obtain a hybrid optical waveguide composed of a polymer and a nonlinear crystal.

Method for building an etching-free hybrid nonlinear waveguide composed of polymer and ion-implanted nonlinear crystal

The present invention provides a method for fabricating KTP nonlinear racetrack micro-ring resonator, composed of six steps: KTP wafer processing, ion implantation, electron beam exposure, subsequent processing, reactive ion etching and final processing. A thin-film waveguide structure similar to the on-insulator lithium niobate thin-film can be achieved through only one process of ion implantation, which enables significantly simplified procedure, shortened time, and reduced cost. Meanwhile, the KTP micro-ring resonator produced according to the present invention has an optical damage threshold several times higher than the existing lithium niobate micro-ring resonator. It can output nonlinear frequency converted light to the power of milliwatts, and suitable for the case where both the input and output optical signals are pulsed lasers. Since Ion implantation, electron beam exposure, metal evaporation deposition, and reactive ion etching are all relatively developed micro-nano machining technologies, the present invention has wonderful operability and repeatability.

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Jinan, China

Chen Chen