Mattson Technology, Inc

Mattson Technology Canada, Inc.

Chee Chin

David Malcolm Camm

Greg Stuart

Steve McCoy

Arne Kjorvel

Tilman Thrum

Tony Komasa

Mike Krasnich

Igor Rudic

Tony Hewett

Joseph Reyers

Ludmila Shepelev

Alex Viel

Rick Doolan

An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.

High-intensity electromagnetic radiation apparatus and methods

Apparatus and methods for producing electromagnetic radiation

Growing community of inventors

Maple Ridge, Canada

Chee Chin